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US 12,154,750 B2Granted
Systems, devices, and methods for ion beam modulation
AssigneeTae Technologies, Inc.
InventorsVladislav Vekselman, Alexander Dunaevsky, Andrey A. Korepanov
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Abstract
Embodiments of systems, devices, and methods relate to an ion beam source system. An ion source is configured to provide a negative ion beam to a tandem accelerator system downstream of the ion source, and a modulator system connected to an extraction electrode of the ion source is configured to bias the extraction electrode for a duration sufficient to maintain acceleration voltage stability of the tandem accelerator system.
Claims20
An ion beam source system, comprising:
- a tandem accelerator system downstream of an ion source and comprising a plurality of capacitors;
- the ion source, wherein the ion source is configured to provide a negative ion beam to the tandem accelerator system downstream;
- and
- a modulator system connected to an extraction electrode of the ion source, wherein the modulator system is configured to:
- bias the extraction electrode until steady state ion extraction and acceleration voltage stability of the tandem accelerator system is achieved;
- and
- discontinue biasing the extraction electrode when a measured voltage across two or more of the plurality of capacitors of the tandem accelerator system is reduced below a threshold.
4 more elements
Dependencies are inferred from the claim text.