Yttrium fluoride sprayed coating, spray material therefor, and corrosion resistant coating including sprayed coating
AssigneeShin-Etsu Chemical Co., Ltd.
InventorsNoriaki Hamaya, Yasushi Takai
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Abstract
An yttrium fluoride sprayed coating having a thickness of 10-500 μm, an oxygen concentration of 1-6 wt %, and a hardness of 350-470 HV is deposited on a substrate surface. The yttrium fluoride sprayed coating exhibits excellent corrosion resistance in a halogen-base gas atmosphere or halogen-base gas plasma atmosphere, functions to protect the substrate from damage by acid penetration during acid cleaning, and minimizes particle generation from a reaction product and due to spall-off from the coating.
Claims15
An yttrium fluoride sprayed coating deposited on a substrate surface, having an yttrium fluoride crystal structure composed of YF3 and at least one compound selected from the group consisting of Y5O4F7, YOF and Y2O3, a thickness of 10 to 500 μm, an oxygen concentration of 1 to 4.8% by weight, and a hardness of at least 350 HV.
An yttrium fluoride sprayed coating deposited on a substrate surface, having an yttrium fluoride crystal structure composed of YF3 and at least one compound selected from the group consisting of Y5O4F7, YOF and Y2O3, a thickness of 10 to 500 μm, an oxygen concentration of 1 to 6% by weight, a carbon content of up to 0.005% by weight, and a hardness of at least 350 HV.
Dependencies are inferred from the claim text.