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US 12,151,938 B2Granted
Copper-filled carbon nanotubes and synthesis methods thereof
AssigneeThe Florida International University Board of Trustees
InventorsWenzhi Li, Arun Thapa
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Abstract
Copper-filled carbon nanotubes and methods of synthesizing the same are provided. Plasma-enhanced chemical vapor deposition can be used to synthesize vertically aligned carbon nanotubes filled with copper nanowires. The copper filling can occur concurrently with the carbon nanotube growth, and the carbon nanotubes can be completely filled by copper. The filling of Cu inside the CNTs can be controlled by tuning the synthesis temperature.
Claims9
A compound comprising:
- a copper (Cu) substrate;
- and
- a plurality of Cu-filled vertically-aligned carbon nanotubes (VACNTs) on the Cu substrate, Cu of the Cu-filled VACNTs being bonded to Cu of the Cu substrate,
- the Cu substrate comprising an average surface roughness of less than 10 nanometers (nm), and the VACNTs having an average filling ratio of the Cu of at least 0.80.
1 more element
Dependencies are inferred from the claim text.