Micromechanical structure, micromechanical system and method of providing a micromechanical structure
AssigneeFraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.
InventorsChristian Drabe, André Dreyhaupt
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Abstract
A micromechanical apparatus includes a substrate, a movable element disposed in a reference plane in an undeflected state, a transmission structure having a first transmission side coupled to the substrate, and a second transmission side coupled to the movable element, and an actuator configured to provide a force along a force direction parallel to the reference plane and apply the same to the first transmission side. The transmission structure is configured to transfer the force along the force direction to a movement of the movable element out of the reference plane.
Claims38
A micromechanical structure comprising:
- a substrate;
- a movable element arranged in a reference plane in an undeflected state;
- a transmission structure comprising a first transmission side coupled to the substrate, and a second transmission side coupled to the movable element;
- an actuator configured to provide a force along a force direction parallel to the reference plane and apply the force to the first transmission side;
- wherein the transmission structure is configured to transfer the force along the force direction to a movement of the movable element out of the reference plane;
- wherein the substrate, the movable element and the transmission structure are arranged in a common substrate plane.
Dependencies are inferred from the claim text.