Composition for formation of zinc oxide thin film, and method for producing a zinc oxide thin film
AssigneeTosoh Finechem Corporation
InventorsYujin Takemoto, Tsukasa Futagoishi, Masahiro Aoki
Life of this patent
Estimating the term…
Loading patent…
AssigneeTosoh Finechem Corporation
InventorsYujin Takemoto, Tsukasa Futagoishi, Masahiro Aoki
Estimating the term…
A composition is provided which contains an organic zinc compound represented by general formula R1—Zn—R1, in which R1 represents a linear or branched alkyl group having 1 to 7 carbon atoms, and an organic metal compound containing a metal element whose oxide has a band gap smaller than 3.2 eV. The composition can be used to form a zinc oxide film by a droplet coating method, such as a spray coating method, at a base material temperature of less than 200° C. A method for producing a zinc oxide film involves coating the composition in the form of droplets at a base material temperature of less than 200° C. to form the zinc oxide film. Using this method, it is possible to provide a zinc oxide thin film having an ultraviolet ray absorption ability, excellent visible light permeability, and a thickness of 1 μm or less.
A composition for producing a zinc oxide thin film by a liquid drop coating method at a base material temperature of less than 200° C., comprising diethylzinc, an organometallic compound represented by the general formula (2):
Dependencies are inferred from the claim text.