Terahertz mixer, method of manufacturing terahertz mixer, and electronic device including terahertz mixer

A terahertz mixer, comprising:

• a cavity for forming a radio frequency input waveguide and a local oscillator input waveguide, and for accommodating a microstrip line;
• and
• the microstrip line formed on at least a part of an inner surface of the cavity by using a semiconductor growth process, wherein the microstrip line extends into a portion of the cavity where the radio frequency input waveguide is located so as to form a microstrip antenna for receiving a radio frequency input signal, and into a portion of the cavity where the local oscillator input waveguide is located so as to form a microstrip antenna for receiving a local oscillator input signal,
• wherein the cavity is formed by a silicon substrate or a gallium arsenide substrate, a groove structure is formed on the silicon substrate or the gallium arsenide substrate, a metal layer is formed on an inner surface of the silicon substrate or the gallium arsenide substrate and on a sidewall of the groove structure, and the cavity is formed by bonding of the metal layer.