Calibration jig and calibration method
AssigneeApplied Materials, Inc.
InventorsAndrew Myles, Denis Martin Koosau, Peter Muraoka, Phillip Criminale
Life of this patent
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Abstract
Apparatus and methods for calibrating a height-adjustable edge ring are described herein. In one example, a calibration jig for positioning an edge ring relative to a reference surface is provided that includes a transparent plate, a plurality of sensors coupled to a first side of the transparent plate, and a plurality of contact pads coupled to an opposing second side of the transparent plate.
Claims20
A method for levelling an edge ring relative to a reference surface, the method comprising:
- positioning a calibration jig relative to the reference surface;
- moving the edge ring relative to the reference surface using a plurality of ring lift pins each coupled to a dedicated drive motor positioned relative to the edge ring at three positions;
- sensing movement of the edge ring using sensors coupled to the calibration jig, each sensor corresponding to a position of a respective ring lift pin;
- calculating an offset that includes a difference in an amount of movement between each of the ring lift pins;
- and
- storing a calibration value in a system controller.
A method for levelling an edge ring relative to a reference surface, the method comprising:
- positioning a calibration jig relative to the reference surface;
- moving the edge ring relative to the reference surface using a plurality of ring lift pins each coupled to a dedicated drive motor positioned relative to the edge ring at three positions;
- quantifying movement of the plurality of ring lift pins;
- leveling the edge ring with the reference surface;
- and
- verifying the calibration.
A method of levelling an edge ring relative to a reference surface, the method comprising:
- positioning a calibration jig relative to the reference surface;
- homing the edge ring with known offsets;
- calibrating offsets of a plurality of ring lift pins configured to move the edge ring relative to a reference surface;
- and
- verifying the calibration of the offsets.
Dependencies are inferred from the claim text.