Photocurable composition and method for producing semiconductor device
AssigneeNissan Chemical Corporation
InventorsHikaru Tokunaga, Takafumi Endo, Keisuke Hashimoto, Rikimaru Sakamoto
Life of this patent
Estimating the term…
Abstract
A photocurable composition for forming coating film having flattening properties on a substrate, with high fillability into patterns and capability of forming a coating film that is free from thermal shrinkage, which contains at least one compound that contains a photodegradable nitrogen-containing and/or photodegradable sulfur-containing structure, a hydrocarbon structure, and a solvent. The compound may have the photodegradable nitrogen-containing and/or photodegradable sulfur-containing structure and the hydrocarbon structure in one molecule, or may be a combination of compounds which contain the structures in separate molecules.
Claims12
A photocurable composition comprising
- at least one compound having a structure including at least one structure selected from the group consisting of a photodegradable nitrogen-containing structure, a photodegradable sulfur-containing structure, and a combination thereof,
- wherein the photodegradable nitrogen-containing structure is a photodegradable nitrogen-containing structure optionally having a sulfur atom, the photodegradable nitrogen-containing structure including a tetrazole structure, a triazole structure, an imidazole structure, an azole structure, a diazo structure, or a combination of these photodegradable nitrogen-containing structures,
- wherein the photodegradable sulfur-containing structure is a photodegradable sulfur-containing structure optionally having a nitrogen atom, the photodegradable sulfur-containing structure including a trisulfide structure, a disulfide structure, a thioketone structure, a thiophene structure, a thiol structure, or a combination of these photodegradable sulfur-containing structures,
- the photocurable composition also including a hydrocarbon structure, wherein the hydrocarbon structure is in the structure of the at least one compound or is in a separate compound included in the photocurable composition, and
- a solvent,
- wherein the at least one compound is a compound obtained by an addition reaction of a carboxylic acid (carboxyl-group)-containing compound, a hydroxyl group-containing compound, an amine (amino-group)-containing compound, or a thiol group-containing compound with an epoxy compound.
Dependencies are inferred from the claim text.