Thermo-optic phase shifters
AssigneeGlobalFoundries U.S. Inc.
InventorsBrian McGowan, Ping-Chuan Wang, Oscar Restrepo
Life of this patent
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Abstract
Structures for a thermo-optic phase shifter and methods of forming such structures. The structure comprises a waveguide structure including a waveguide core. The structure further comprises a silicide layer, a first dielectric layer arranged in a lateral direction between the silicide layer and the waveguide core, and a second dielectric layer positioned over the waveguide core, the silicide layer, and the first dielectric layer. The first dielectric layer comprises a first material having a first thermal conductivity, and the second dielectric layer comprises a second material having a second thermal conductivity that is less than the first thermal conductivity.
Claims20
A structure comprising:
- a waveguide structure including a waveguide core;
- a silicide layer;
- a first dielectric layer arranged in a lateral direction between the silicide layer and the waveguide core, the first dielectric layer comprising a first material having a first thermal conductivity;
- and
- a second dielectric layer positioned over the waveguide core, the silicide layer, and the first dielectric layer, the second dielectric layer comprising a second material having a second thermal conductivity that is less than the first thermal conductivity.
A method comprising:
- forming a waveguide structure including a waveguide core;
- forming a silicide layer;
- forming a first dielectric layer arranged in a lateral direction between the silicide layer and the waveguide core, wherein the first dielectric layer comprises a first material having a first thermal conductivity;
- and
- forming a second dielectric layer positioned over the waveguide core, the silicide layer, and the first dielectric layer, wherein the second dielectric layer comprises a second material having a second thermal conductivity that is less than the first thermal conductivity.
Dependencies are inferred from the claim text.