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US 12,145,955 B2Granted
Cyclic azastannane and cyclic oxostannane compounds and methods for preparation thereof
AssigneesGelest, Inc., Mitsubishi Chemical Corporation
InventorLi Yang
Life of this patent
Estimating the term…
Abstract
Cyclic azastannanes and cyclic oxostannanes having formulas (I) and (II) where X is an alkoxy or dialkylamino group are a new class of cyclic compounds. These compounds have desirably high vapor pressure and high purity (containing low levels of polyalkyl contaminants after purification), and have particular interest for EUV photoresist applications. Methods for preparing these compounds are described.
Claims10
A cyclic azastannane having formula (I):
- wherein X is OR or NR′2, n is an integer of 1 to 3, R is a primary, secondary, or tertiary alkyl group having 1 to about 5 carbon atoms or a substituted or unsubstituted aryl group having about 6 to about 10 carbon atoms, R′ is a primary alkyl group having 1 to about 2 carbon atoms, R″ is hydrogen, a substituted or unsubstituted primary, secondary, or tertiary, saturated or unsaturated, linear, branched, or cyclic alkyl group having 1 to about 20 carbon atoms, a substituted or unsubstituted, branched or linear aralkyl group having about 7 to about 10 carbon atoms, or a substituted or unsubstituted aryl group having about 6 to about 10 carbon atoms, and R″′ is hydrogen, a substituted or unsubstituted primary, secondary, or tertiary, saturated or unsaturated, linear, branched, or cyclic alkyl group having 1 to about 20 carbon atoms, a substituted or unsubstituted, branched or linear aralkyl group having about 7 to about 10 carbon atoms, or a substituted or unsubstituted aryl group having about 6 to about 10 carbon atoms.
A cyclic oxostannane having formula (II):
- wherein X is OR or NR′2, n is an integer of 1 to 3, R is a primary, secondary, or tertiary alkyl group having 1 to about 5 carbon atoms or a substituted or unsubstituted aryl group having about 6 to about 10 carbon atoms, R′ is a primary alkyl group having 1 to about 2 carbon atoms, and R″′ is hydrogen, a substituted or unsubstituted primary, secondary, or tertiary, saturated or unsaturated, linear, branched, or cyclic alkyl group having 1 to about 20 carbon atoms, a substituted or unsubstituted, branched or linear aralkyl group having about 7 to about 10 carbon atoms, or a substituted or unsubstituted aryl group having about 6 to about 10 carbon atoms.
Dependencies are inferred from the claim text.