Conditioning disk replacement apparatus and method
AssigneeSamsung Electronics Co., Ltd.
InventorsHoseop Choi, Minseop Park, Jubong Lee, Sung Yong Park, Kiju Sohn, Jaeyoung Eom
Life of this patent
Estimating the term…
Abstract
A conditioning disk replacement apparatus includes; a detacher configured to separate a conditioning disk from to a holder, a transfer part configured to transfer the conditioning disk, and a container configured to store the conditioning disk. The detacher includes a detachment body and a rotary part coupled to the detachment body, the rotary part includes a key protruding outward from the rotary part in a first horizontal direction, and the rotary part is configured to rotate about a central axis extending in the first horizontal direction.
Claims13
A conditioning disk replacement apparatus, comprising:
- a detacher configured to separate a conditioning disk from a holder;
- a transporter configured to transfer the conditioning disk;
- and
- a container configured to store the conditioning disk,
- wherein the detacher includes a detachment body and a rotator that is coupled to the detachment body,
- wherein the rotator includes a key protruding outward from the rotator in a first horizontal direction,
- wherein the rotator is configured to rotate the key about an axis extending in the first horizontal direction, and wherein rotating the key about the axis, after the key is inserted into a groove between the conditioning disk and the holder, causes an upper surface of the key to press on a portion of a lower surface of the holder and causes a lower surface of the key to press on a portion of an upper surface of the conditioning disk so as to separate the conditioning disk from the holder,
- wherein the container includes a plurality of cantilever members, and
- wherein each cantilever member of the plurality of cantilever members includes a respective coupling magnet and at least one respective guide pin, the at least one respective guide pin coupled to a lower surface of the corresponding cantilever member.
A conditioning disk replacement apparatus, comprising:
- a detacher configured to separate a conditioning disk from a holder of a chemical mechanical polishing apparatus;
- and
- a container that includes a plurality of cantilever members,
- wherein the detacher includes a detachment body and a rotator that is coupled to the detachment body,
- wherein the rotator includes a key protruding in a first horizontal direction from the detachment body and extending in a second horizontal direction,
- wherein the rotator is configured to rotate the key about an axis extending in the first horizontal direction, and wherein rotating the key about the axis, after the key is inserted into a groove between the conditioning disk and the holder, causes an upper surface of the key to press on a portion of a lower surface of the holder and causes a lower surface of the key to press on a portion of an upper surface of the conditioning disk so as to separate the conditioning disk from the holder, and
- wherein each cantilever member of the plurality of cantilever members includes a respective coupling magnet and at least one respective guide pin, the at least one respective guide pin coupled to a lower surface of the corresponding cantilever member.
Dependencies are inferred from the claim text.