Displacement measuring apparatus
AssigneeMitutoyo Corporation
InventorMasataka Yamamuro
Life of this patent
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Abstract
There is provided a displacement measuring apparatus capable of being used in a vacuum environment. The displacement measuring apparatus includes a scale and a detection head part disposed in such a manner as to be relatively displaceable to the scale and as to face the scale with a predetermined gap. The detection head part detects a displacement or position relative to the scale. The scale is disposed in a vacuum. The detection head part is housed in a housing holder separating an atmospheric environment side from a vacuum environment side. In a gap between the detection head part and the scale, the housing holder includes a relay means for passing a detection signal between the detection head part and the scale.
Claims8
A displacement measuring apparatus comprising:
- a scale having a scale pattern along a positioning direction;
- and
- a detection head part disposed so as to be relatively displaceable to the scale along the positioning direction and to face the scale with a predetermined gap and configured to detect a displacement or position relative to the scale, wherein
- the scale is disposed in a vacuum,
- the detection head part is disposed in an atmosphere,
- the detection head part is housed in a housing holder separating an atmospheric environment side from a vacuum environment side, and
- the housing holder includes a relay means, said relay means being disposed in the predetermined gap between the detection head part and the scale, said relay means passing a detection signal between the detection head part and the scale.
Dependencies are inferred from the claim text.