A method for producing a two-stage heat regenerating cryogenic refrigerator, the two-stage heat regenerating cryogenic refrigerator including a vacuum vessel, a first cylinder disposed in the vessel, a second cylinder disposed in the vessel and coaxially connected to the first cylinder, a first regenerator disposed in the first cylinder, and a second regenerator disposed in the second cylinder, the method comprising:
- accommodating a first heat regenerating material in the first regenerator;
- and
- filling a plurality of heat regenerating material particles in the second regenerator, the heat regenerating material particles being a second heat regenerating material, each of the heat regenerating material particles including a heat regenerating substance having a maximum value of specific heat at a temperature of 20 K or less of 0.3 J/cm3·K or more and one metal element selected from the group consisting of calcium (Ca), manganese (Mn), magnesium (Mg), beryllium (Be), strontium (Sr), aluminum (Al), iron (Fe), copper (Cu), nickel (Ni), and cobalt (Co),
- wherein each of the heat regenerating material particles includes a first region and a second region,
- wherein the second region is closer to an outer edge of each of the heat regenerating material particles than the first region,
- wherein the second region has a higher concentration of the metal element than the first region,
- wherein the first region and the second region contain the heat regenerating substance, and
- wherein the heat regenerating substance comprises a component in a form of an oxide or an oxysulfide.