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US 12,140,146 B2Granted
Vacuum pump system and method for operating a vacuum pump system
AssigneeLeybold Aktiengesellschaft
InventorsMax Pelikan, Raffaello Ghislotti, Dirk Schiller, Daniel Reinhard
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Abstract
A vacuum pump system comprising a main vacuum pump that is connected to a chamber that is to be evacuated. An auxiliary pump is connected to an outlet of the main vacuum pump. Furthermore, a sealing gas supply device is connected to the main vacuum pump. The sealing gas supply device is switched on and off with the aid of a control device as a function of a predetermined control variable. Additionally, a method for controlling the vacuum pump system.
Claims7
A vacuum pump system, comprising:
- a main vacuum pump adapted to be connected to a chamber to be evacuated;
- an auxiliary pump connected to an outlet of the main vacuum pump;
- a sealing gas supply device;
- and
- a control device connected to the sealing gas supply device and to the auxiliary pump, the control device being configured to switch the sealing gas supply device and/or the auxiliary vacuum pump off and on as a function of at least two predetermined control variables,
- wherein the at least two predetermined control variables comprise a pressure falling below a value of 1 mbar at an inlet of the main vacuum pump and a second pressure falling below a value of 1020 mbar at the outlet of the main vacuum pump.
3 more elements
Dependencies are inferred from the claim text.