Systems and methods for high-rate electrochemical arsine generation
AssigneeUtica Leaseco, LLC
InventorsNabil A. Khater, Kuanping Gong, Chaowei Wang, Daniel Mark Dobkin
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AssigneeUtica Leaseco, LLC
InventorsNabil A. Khater, Kuanping Gong, Chaowei Wang, Daniel Mark Dobkin
Estimating the term…
A system and method for generating arsine are disclosed. The system may include a shell having a top interior surface. The system may also include a cathode-anode assembly positioned in the shell and forming an elongated structure substantially parallel to the top surface. The cathode-anode assembly may include a first electrode and a second electrode surrounding the first electrode and forming a gap therebetween. The second electrode may include a plurality of channels along a length of the second electrode. The plurality of channels may allow circulation of electrolyte within and around at least a portion of the cathode-anode assembly and allow gases generated in response to current applied to the cathode-anode assembly to escape from the cathode-anode assembly. Such gases may be used as precursor gases for a high-volume metal-organic chemical vapor deposition (MOCVD) operation.
A gas generator comprising:
A gas generator comprising:
Dependencies are inferred from the claim text.