Silicon-containing oxide-coated aluminum nitride particle and method of manufacturing the same
AssigneeResonac Corporation
InventorsYuki Otsuka, Hidetoshi Okamoto, Naoki Minorikawa
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Abstract
A silicon-containing oxide-coated aluminum nitride particle including an aluminum nitride particle and a silicon-containing oxide coating covering the surface of the aluminum nitride particle. The content of carbon atoms is less than 1000 ppm by mass, and an Si/Al atom ratio of the surface as measured by AES analysis is 0.29 or more and 5.0 or less. In another aspect, the coverage of the silicon-containing oxide coating covering the surface of the aluminum nitride particle as measured by LEIS analysis is 15% or more and 100% or less.
Claims4
A silicon-containing oxide-coated aluminum nitride particle including an aluminum nitride particle and a silicon-containing oxide coating covering the surface of the aluminum nitride particle, wherein
- the content of carbon atoms is less than 1000 ppm by mass,
- the coverage of the silicon-containing oxide coating covering the surface of the aluminum nitride particle as measured by LEIS analysis is 15% or more and 100% or less, and
- the silicon-containing oxide-coated aluminum nitride particle satisfies the following formula (4) wherein x represents the specific surface area (m2/g) of a silicon-containing oxide-coated aluminum nitride particle as determined by a BET method, and y represents the content of silicon atoms (ppm by mass) in a silicon-containing oxide-coated aluminum nitride particle,
- y≤1000x+500 (4).
Dependencies are inferred from the claim text.