Control unit and substrate treating apparatus including the same

A control unit for performing maintenance of an inkjet head unit for discharging a substrate treatment liquid onto a substrate comprising:

• a count module for counting the number of discharges for each nozzle of the inkjet head unit, wherein the count module counts the number of discharges based on whether a voltage is applied to a piezoelectric element involved in operation of a nozzle;
• a comparison module for comparing the number of discharges with a reference value to determine whether the number of discharges is equal to or greater than the reference value;
• and
• an evaluation module for evaluating whether a life of the inkjet head unit has reached a usable life based on whether the number of discharges of each nozzle is equal to or greater than the reference value,
• wherein the control unit allows a nozzle with a relatively small usage amount to participate in printing the substrate based on a usage amount for each nozzle,
• wherein the reference value is related to at least one of a print quality for the substrate and a nozzle that does not participate in printing the substrate.

An apparatus for treating a substrate comprising:

• a process treating unit for supporting a substrate while a substrate is treated;
• an inkjet head unit including a plurality of nozzles and for discharging a substrate treatment liquid onto the substrate through the plurality of nozzles;
• a gantry unit for moving the inkjet head unit;
• a substrate treatment liquid supply unit for supplying the substrate treatment liquid to the inkjet head unit;
• and
• a control unit for performing maintenance of the inkjet head unit;
• wherein the control unit comprises,
• a count module for counting the number of discharges for each nozzle of the inkjet head unit;
• a comparison module for comparing the number of discharges with a reference value to determine whether the number of discharges is equal to or greater than the reference value;
• and
• an evaluation module for evaluating whether a life of the inkjet head unit has reached a usable life based on whether the number of discharges of each nozzle is equal to or greater than the reference value;
• and
• a camera sensor for capturing a space between the at least one nozzle and the substrate when at least one of the plurality of nozzles discharges the substrate treatment liquid onto the substrate.