Vibrator element including base part, vibrating arm and weight provided to vibrating arm, vibrator device including vibrator element, and method of manufacturing vibrator element

A method of manufacturing a vibrator element, comprising:

• preparing a vibrator element including a base part, a vibrating arm coupled to the base part, and a weight provided to a principal surface of the vibrating arm;
• and
• forming at least one processing scar on the weight by irradiating the weight with a laser beam to thin or remove the weight in a thickness direction of the vibrating arm, wherein
• when an axis which overlaps a center in a width direction of the vibrating arm, and which extends along an extending direction of the vibrating arm is defined as a central axis, and an axis which overlaps a centroid of the vibrating arm, and which extends along the extending direction of the vibrating arm is defined as a centroid axis in a plan view of the principal surface, the at least one processing scar is formed in at least an area at the centroid axis side with respect to the central axis in the forming at least one processing scar, and
• an area of the at least one processing scar located at the centroid axis side with respect to the central axis is greater than an area of the at least one processing scar located at an opposite side to the centroid axis with respect to the central axis.