Piezoelectric element device, piezoelectric element apparatus, and load detection method

Abstract

A piezoelectric element device includes: a substrate including a plurality of vibrating portions having a first vibrating portion and a second vibrating portion; a piezoelectric element group in which a plurality of piezoelectric elements having a first piezoelectric element and a second piezoelectric element provided in the plurality of vibrating portions are coupled in parallel to each other; a plurality of load detectors having a first load detector including the first vibrating portion and the first piezoelectric element provided in the first vibrating portion and a second load detector including the second vibrating portion and the second piezoelectric element provided in the second vibrating portion; and a resin layer covering the piezoelectric element group. The first load detector resonates at a first resonance frequency, the second load detector resonates at a second resonance frequency, the first resonance frequency and the second resonance frequency are different from each other, the first resonance frequency changes in accordance with a load applied to the first load detectors via the resin layer, the second resonance frequency changes in accordance with a load applied to the second load detectors via the resin layer, and a first resonance frequency change range, which are changeable range of the first resonance frequency, and a second resonance frequency change range, which are changeable range of the second resonance frequency, do not overlap each other.

Dependencies are inferred from the claim text.