Gas circulation apparatus, gas circulation method, pneumatic apparatus, and semiconductor device
AssigneeChangxin Memory Technologies, Inc.
InventorQing Huang
Life of this patent
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AssigneeChangxin Memory Technologies, Inc.
InventorQing Huang
Estimating the term…
A gas circulation apparatus is applied to a pneumatic apparatus including a solenoid valve apparatus and a cylinder apparatus, and is connected in series between the solenoid valve apparatus and the cylinder apparatus. The gas circulation apparatus includes a valve core structure, a first circulation cavity, and a second circulation cavity. The valve core structure is configured to move in a first direction, so that compressed gas discharged from a first cylinder cavity of the cylinder apparatus and passing through the solenoid valve apparatus is collected and stored by the first circulation cavity, and a second cylinder cavity of the cylinder apparatus is supplied with compressed gas stored in the second circulation cavity together with the compressed gas supplied from the solenoid valve apparatus.
A gas circulation apparatus, applied to a pneumatic apparatus comprising a solenoid valve apparatus and a cylinder apparatus, wherein the gas circulation apparatus is connected in series between the solenoid valve apparatus and the cylinder apparatus;
A gas circulation method, applied to a gas circulation apparatus which is connected in series between a solenoid valve apparatus and a cylinder apparatus and comprises a valve core structure, a first circulation cavity, and a second circulation cavity, the method comprising:
A pneumatic apparatus, comprising a cylinder apparatus, a solenoid valve apparatus, and a gas circulation apparatus,
Dependencies are inferred from the claim text.