Pressure control device and substrate treatment apparatus including the same

A pressure control device comprising:

• a negative pressure generating module receiving source negative pressure and generating process negative pressure through the operation of a first intake valve and a first exhaust valve;
• a positive pressure generating module receiving source positive pressure and generating process positive pressure through the operation of a second intake valve and a second exhaust valve;
• and
• a switching module selectively providing the process negative pressure or the process positive pressure to a target,
• wherein the negative pressure generating module comprises:
• a first input terminal receiving the source negative pressure;
• the first intake valve connected between the first input terminal and a first output terminal;
• the first exhaust valve connected to the first output terminal;
• a first pressure sensor connected to the first output terminal and generating a first sensed value by sensing pressure at the first output terminal;
• and
• a controller simultaneously operating the first intake valve and the first exhaust valve by simultaneously operating a first control loop for adjusting the degree of opening of the first intake valve by comparing the first sensed value with a first target value and a second control loop for adjusting the degree of opening of the first exhaust valve by comparing the first sensed value with a second target value.

A substrate treatment apparatus comprising:

• an inkjet head;
• a reservoir storing ink, providing the ink to the inkjet head, and selectively receiving process negative pressure or process positive pressure;
• and
• a pressure control device selectively providing the process negative pressure or the process positive pressure to the reservoir,
• wherein the pressure control device comprises:
• a negative pressure generating module receiving source negative pressure and generating the process negative pressure for controlling the meniscus of the inkjet head through the operation of a first intake valve and a first exhaust valve;
• a positive pressure generating module receiving source positive pressure and generating the process positive pressure for maintenance of the inkjet head through the operation of a second intake valve and a second exhaust valve;
• and
• a switching module selectively providing the process negative pressure or the process positive pressure to a target,
• wherein the negative pressure generating module comprises a first input terminal receiving the source negative pressure, the first intake valve connected between the first input terminal and a first output terminal, the first exhaust valve connected to the first output terminal, a first pressure sensor connected to the first output terminal and generating a first sensed value by sensing pressure at the first output terminal, and a first controller simultaneously operating the first intake valve and the first exhaust valve by simultaneously operating a first control loop for adjusting the degree of opening of the first intake valve by comparing the first sensed value with a first target value and a second control loop for adjusting the degree of opening of the first exhaust valve by comparing the first sensed value with the first target value, and the positive pressure generating module comprises a second input terminal receiving the source positive pressure, the second intake valve connected between the second input terminal and a second output terminal, the second exhaust valve connected to the second output terminal, a second pressure sensor connected to the second output terminal and generating a second sensed value by sensing pressure at the second output terminal, and a second controller simultaneously operating the second intake valve and the second exhaust valve by simultaneously operating a third control loop for adjusting the degree of opening of the second intake valve by comparing the second sensed value with a second target value and a fourth control loop for adjusting the degree of opening of the second exhaust valve by comparing the second sensed value with the second target value.