Back to results
US 12,134,164 B2Granted
Channel cut polishing machine
AssigneeUchicago Argonne, LLC
InventorsElina Kasman, Jonathan Montgomery
Life of this patent
Estimating the term…
Abstract
A device for polishing of a multi-surface workpiece is described. The device includes a base and a vertical motion platform that moves along two support rods, which carries a motor that drives a rotating shaft. The support rods extend from said base. A polishing tool is attached to the motor shaft. The workpiece being polished is placed on a linear motion stage during the polishing process.
Claims20
A method of polishing of a workpiece comprising:
- placing the workpiece on a tray;
- removably mounting the workpiece to the tray using an adhesive;
- wherein said tray is attached to a support base and wherein said support base is in turn attached to an alignment and a linear motion stage wherein the alignment and linear motion stage is capable of moving in a horizontal direction;
- installing a polishing pad on a polishing tool;
- attaching the polishing tool on a rotating shaft;
- attaching the rotating shaft to a motor installed on a vertical motion platform;
- wherein said vertical motion platform is disposed above the workpiece removably mounted to the tray;
- beginning the rotation of the polishing tool;
- lowering the polishing tool to the workpiece;
- contacting the rotating polishing pad with regions of workpiece surfaces;
- moving the linear motion stage and the vertical motion platform to polish the regions of the workpiece;
- detecting the surface profile of the workpiece;
- ceasing the rotation of the polishing pad upon detection of a smooth surface on the workpiece;
- raising of the vertical platform and the polishing tool;
- and
- removing of the workpiece, wherein contact-less measurements are made to determine when polishing is completed.
13 more elements
A method of polishing of a workpiece comprising:
- placing the workpiece on a tray;
- removably mounting the workpiece to the tray using an adhesive;
- wherein said tray is attached to a support base and wherein said support base is in turn attached to an alignment and linear motion stage wherein the alignment and linear motion stage is capable of moving to in a horizontal direction;
- installing a polishing pad on a polishing tool;
- attaching the polishing tool on a rotating shaft;
- attaching the rotating shaft to a motor installed on a vertical motion platform;
- wherein said vertical motion platform is disposed above the workpiece reversibly attached to the tray;
- beginning the rotation of the polishing tool;
- lowering the polishing tool to the workpiece;
- contacting the rotating polishing pad with regions of workpiece surfaces;
- moving the linear motion stage and the vertical motion platform to polish the regions of the workpiece;
- detecting the surface profile of the workpiece;
- ceasing the rotation of the polishing pad upon detection of a smooth surface on the workpiece;
- raising of the vertical platform and the polishing tool;
- and
- removing of the workpiece
- further comprising attaching at least one outrigger block to said tray containing the workpiece at the beginning of the process.
14 more elements
Dependencies are inferred from the claim text.