Systems and methods for casting sputtering targets
AssigneeJunora LTD
InventorsDean Plaisted, Nancy Norberg, Paul Carter, Larry Ferrin, Patrick Morse
Life of this patent
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AssigneeJunora LTD
InventorsDean Plaisted, Nancy Norberg, Paul Carter, Larry Ferrin, Patrick Morse
Estimating the term…
Methods for manufacturing rotary target materials that allow a material to be cast in a melting zone of a casting vessel while the vessel is rotated such that a melting zone is below a casting zone. The vessel is sealed and the pressure inside the vessel is reduced and the exterior of the vessel is heated. The melting zone of the vessel is heated to a temperature that melts the material and releases any trapped gasses which can be pumped out using the vacuum pump. Once the melting zone and molten material have reached a specified temperature, outgassed, and the casting zone has reached a temperature to maximize adhesion and reduce voids and defects, the vessel is rotated until the melting zone is directly above the casting zone to transfer the material from the melting zone to the casting zone.
A rotatable sputtering target casting manufacturing process, comprising the steps of:
Dependencies are inferred from the claim text.