Transfer system, transfer device, and transfer method
AssigneeTokyo Electron Limited
InventorsNorihiko Amikura, Toshiaki Toyomaki, Masatomo Kita
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AssigneeTokyo Electron Limited
InventorsNorihiko Amikura, Toshiaki Toyomaki, Masatomo Kita
Estimating the term…
According to an aspect of the present disclosure, there is provided a transfer system comprising a transfer robot configured to transfer a transfer target object by an end effector based on an operation instruction, and a controller configured to output the operation instruction to the transfer robot, wherein at least any one of the end effector and the transfer target object has at least any one of a sensor and a camera, the controller calculates a relative position between the end effector and the transfer target object based on at least any one of a detected result of the sensor and a captured result of the camera, and the controller determines a teaching position of the end effector with respect to the transfer target object based on the relative position, and outputs the operation instruction to the transfer robot such that the end effector is disposed at the teaching position.
A transfer system comprising:
A transfer device for transferring a transfer target object, the transfer device comprising:
A transfer method performed by a transfer system,
Dependencies are inferred from the claim text.