Substrate mapping device, method of mapping by the device, and method of teaching the mapping

A method of mapping substrates by using a substrate mapping device including a hand that includes a mapping sensor configured to detect a state of a substrate, a manipulator that is connected to the hand, the manipulator configured to move the mapping sensor, and a control circuitry configured to control the manipulator to move the mapping sensor along a mapping course, the method comprising:

• (A) placing, on a table, a container where the substrates are accommodated so as to be arrayed, wherein the container is inclined;
• (B) obtaining, by the control circuitry, a first mapping position and a second mapping position different from the first mapping position in a position in an arrayed direction of the substrates in the container placed on the table, wherein the first mapping position is a lowermost slot of the container and the second mapping position is an uppermost slot of the container:
• (C) setting, by the control circuitry, the mapping course to be a straight-line moving path on which the hand moves in a straight line, that is inclined relative to a front and rear direction of the container, from the first mapping position to the second mapping position;
• and
• (D) mapping, by the control circuitry, the substrates accommodated in the container by moving the mapping sensor along the mapping course.

A method of teaching mapping of substrates by using a substrate mapping device including a hand that includes a mapping sensor configured to detect a state of a substrate, a manipulator that is connected to the hand, the manipulator configured to move the mapping sensor, and a control circuitry configured to control the manipulator to move the mapping sensor along a mapping course, the method comprising:

• (A) placing, on a table, a container where the plurality of substrates are accommodated so as to be arrayed, wherein the container is inclined;
• (B) obtaining, by the control circuitry, a first mapping position and a second mapping position different from the first mapping position in a position in an arrayed direction of the substrates in the container placed on the table, wherein the first mapping position is a lowermost slot of the container and the second mapping position is an uppermost slot of the container;
• and
• (C) setting, by the control circuitry, the mapping course to be a straight-line moving path on which the hand moves in a straight line, that is inclined relative to a front and rear direction of the container, from the first mapping position to the second mapping position.