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US 12,129,529 B2Granted
Oxidation-resistant metallic tin
AssigneeJX Advanced Metals Corporation
InventorsTakahiro Uchida, Toru Imori, Koichi Takemoto, Shiro Tsukamoto
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Abstract
In the present invention, a high-purity metallic tin suitable for use in an EUV exposure device is provided through use of an oxidation-resistant metallic tin, the oxidation-resistant metallic tin containing 99.995 mass % or more of tin, and unavoidable impurities, and the thickness of an oxide film being 2.0 nm or less when the surface of a cut face of the oxidation-resistant metallic tin is measured by AES.
Claims8
An oxidation-resistant metallic tin made by steps of an electrolytic refining process, heat treatment and then forging,
- wherein:
- the oxidation-resistant metallic tin comprises at least 99.995% by weight of tin, and inevitable impurities,
- the oxidation-resistant metallic tin has an oxide film on a surface of a cutting face of the oxidation-resistant metallic tin, and
- after the forging, a thickness of the oxide film on the surface of the cutting face as measured by AES, upon starting the measurement after atmospheric exposure for 72 hours immediately after cutting, is 2.0 nm or less but greater than zero nm.
1 more element
Dependencies are inferred from the claim text.