Target, film forming apparatus, and method of manufacturing film formation object
AssigneeJsw Afty Corporation
InventorsHironori Torii, Kouji Kageyama
Life of this patent
Estimating the term…
Abstract
An object is to extend the life of the target member. The target (TA2) is designed to have a symmetrical structure so as to realize an invertible configuration. According to this, even if the consumption of the target member (71) is large on the side closer to the plasma generation unit where the plasma density is high, the portion of the target member (71) which has been located on the side closer to the film formation object where the plasma density is low and is thus consumed less can be rearranged on the side closer to the plasma generation unit where the plasma density is high, by inverting the target (TA2).
Claims3
A target comprising:
- a target member having a cylindrical shape;
- and
- a support member configured to support the target member,
- wherein the support member has a wall portion in contact with the target member via an adhesive member,
- wherein the wall portion includes:
- a first portion formed to have a first thickness;
- a second portion formed to have a second thickness thicker than the first thickness;
- and
- a third portion formed to have the first thickness,
- wherein the second portion is sandwiched between the first portion and the third portion,
- wherein the first portion and the third portion are symmetrically arranged with respect to a virtual plane which is orthogonal to a center line of the cylindrical shape and divides the target member into equal halves, and
- wherein the second portion includes a concave portion which is thicker than the first portion and is thinner than the second thickness.
Dependencies are inferred from the claim text.