Thermal-aided inspection by advanced charge controller module in a charged particle system
AssigneeASML Netherlands B.V.
InventorsNing Ye, Jun Jiang, Jian Zhang, Yixiang Wang
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Abstract
Apparatuses, systems, and methods for providing beams for controlling charges on a sample surface of charged particle beam system. In some embodiments, a module comprising a laser source configured to emit a beam. The beam may illuminate an area adjacent to a pixel on a wafer to indirectly heat the pixel to mitigate a cause of a direct photon-induced effect at the pixel. An electron beam tool configured to detect a defect in the pixel, wherein the defect is induced by the indirect heating of the pixel.
Claims20
A non-transitory computer readable medium that stores a set of instructions that is executable by at least one processor of a computing device to cause the computing device to perform a method for inspection, the method comprising:
- emitting, from a module, a beam that illuminates an area adjacent to a pixel on a wafer to indirectly heat the pixel to mitigate a cause of a direct photon-induced effect at the pixel;
- and
- detecting a defect in the pixel, wherein the defect is induced by the indirect heating of the pixel.
An electron beam system, the system comprising:
- a module configured to emit a beam that illuminates a pixel on a wafer to heat the pixel to mitigate a cause of a direct photon-induced effect at the pixel;
- and
- an electron beam tool configured to detect a defect in the pixel, wherein the defect is induced by the heating of the pixel.
Dependencies are inferred from the claim text.