Surface metrology systems and methods thereof
AssigneeOptiPro Systems, LLC
InventorJames Fredric Munro
Life of this patent
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Abstract
A system for measuring the topography of a surface including a carriage assembly and a base assembly. The carriage assembly comprising a plurality of displacement-measuring probes coupled to a carriage support structure. The base assembly positioned adjacent to the carriage assembly and comprising at least one reference object with an opening sized to receive a test object. At least one of the carriage assembly or the base assembly is configured to translate with respect to the other in at least two directions to enable at least one of the displacement-measuring probes to measure a displacement to a reference surface of the reference object and at least another one of the displacement-measuring probes to measure a displacement to a target surface of the target object whose topography is measured.
Claims20
A system for measuring the topography of a surface, the system comprising:
- a carriage assembly comprising a plurality of displacement-measuring probes coupled to a carriage support structure;
- and
- a base assembly positioned adjacent to the carriage assembly, the base assembly comprising at least one reference object with an opening sized to receive a target object;
- wherein at least one of the carriage assembly or the base assembly is configured to translate with respect to the other in at least two directions to enable at least one of the displacement-measuring probes to measure a displacement to a reference surface of the reference object and at least another one of the displacement-measuring probes to measure a displacement to a target surface of the target object whose topography is measured, wherein the base assembly and the reference object have a matching thermal coefficient of expansion and wherein at least one of the displacement-measurement probes comprises a chromatic interferometric probe configured with a beam splitter to form reference and measurements arms.
A method for making a surface topography measurement system, the method comprising:
- coupling a plurality of displacement-measuring probes to a carriage support structure to generate a carriage assembly;
- and
- positioning a base assembly adjacent to the carriage assembly, the base assembly comprising a reference object with an opening sized to receive a target object;
- wherein at least one of the carriage assembly or the base assembly is configured to translate with respect to the other in at least two directions to enable at least one of the displacement-measuring probes to measure a displacement to a reference surface of the reference object and at least another one of the displacement-measuring probes to measure a displacement to a target surface of the target object whose topography is measured, wherein the base assembly and the reference object have a matching thermal coefficient of expansion and wherein at least one of the displacement-measurement probes comprises a chromatic interferometric probe configured with a beam splitter to form reference and measurements arms.
Dependencies are inferred from the claim text.