Powder-atomic-layer-deposition device with knocker

A powder-atomic-layer-deposition device with knocker, comprising:

• a vacuum chamber comprising a front wall, a rear wall and a side wall, wherein the front wall faces the rear wall and connects to the rear wall via the side wall, and wherein the front wall, the rear wall and the side wall together define a reacting space for containing a plurality of powders;
• a shaft seal connected to the rear wall of the vacuum chamber and comprising an outer tube and an inner tube, wherein the outer tube has a containing space for containing the inner tube;
• a drive unit connected to the shaft seal for driving the vacuum chamber to rotate via the shaft seal;
• at least one gas-extracting pipeline positioned within the inner tube and fluidly connected to the reacting space of the vacuum chamber for gas extraction of the reacting space;
• at least one gas-inlet pipeline positioned within the inner tube and fluidly connected to the reacting space of the vacuum chamber for transferring a precursor gas into the reacting space;
• and
• a knocker disposed adjacent to the vacuum chamber for knocking the vacuum chamber,
• wherein the at least one gas-inlet pipeline comprises at least one inert-gas pipeline and at least one reactive-gas pipeline, and wherein the at least one inert-gas pipeline is for transferring an inert gas into the reacting space for blowing the powders within the reacting space, and the at least one reactive-gas pipeline is for transferring the precursor gas into the reacting space;
• wherein the at least one inert-gas pipeline comprises an extension pipeline, and wherein the extension pipeline is positioned within the reacting space and extends toward the front wall of the vacuum chamber.