Microelectronics H-frame device
AssigneeNorthrop Grumman Systems Corporation
InventorsDah-Weih Duan, Elizabeth T. Kunkee, Martin E. Roden, Laura M. Woo
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AssigneeNorthrop Grumman Systems Corporation
InventorsDah-Weih Duan, Elizabeth T. Kunkee, Martin E. Roden, Laura M. Woo
Estimating the term…
A microelectronics H-frame device includes: a stack of two or more substrates wherein the substrate stack comprises a top substrate and a bottom substrate, wherein bonding of the top substrate to the bottom substrate creates a vertical electrical connection between the top substrate and the bottom substrate, wherein the top surface of the top substrate comprises top substrate top metallization, wherein the bottom surface of the bottom substrate comprises bottom substrate bottom metallization; mid-substrate metallization located between the top substrate and the bottom substrate; a micro-machined top cover bonded to a top side of the substrate stack; and a micro-machined bottom cover bonded to a bottom side of the substrate stack.
A microelectronics H-frame device, comprising:
Dependencies are inferred from the claim text.