Multifunctional C4F7N/CO2 mixed gas preparation system and preparation method

A multifunctional C4F7N/CO2 mixed gas preparation system, comprising a C4F7N input port, a CO2 input port, a C4F7N heat exchanger, a CO2 heat exchanger, a C4F7N/CO2 mixing pipeline structure, and a C4F7N/CO2 mixed gas output pipeline structure;

• the C4F7N heat exchanger is used to heat and vaporize C4F7N input through the C4F7N input port;
• the CO2 heat exchanger is used to heat and vaporize CO2 input through the CO2 input port;
• the C4F7N/CO2 mixing pipeline structure is used to mix heated C4F7N and heated CO2, and the C4F7N/CO2 mixed gas output pipeline structure is used to output C4F7N/CO2 mixed gas;
• the C4F7N/CO2 mixing pipeline structure comprises a C4F7N/CO2 dynamic gas preparation pipeline structure and a C4F7N/CO2 partial pressure mixing pipeline structure;
• and
• the C4F7N/CO2 dynamic gas preparation pipeline structure and the C4F7N/CO2 partial pressure mixing pipeline structure are arranged in parallel;
• wherein the C4F7N/CO2 dynamic gas preparation pipeline structure is used to quantitatively mix the heated CO2 and the heated C4F7N;
• and the C4F7N/CO2 partial pressure mixing pipeline structure is used to mix the heated CO2 and the heated C4F7N at certain pressures;
• wherein the C4F7N/CO2 dynamic gas preparation pipeline structure comprises a first solenoid valve, a second solenoid valve, a first thermal mass flow meter, a second thermal mass flow meter, a buffer mixing tank, a first pipe, and a second pipe;
• the buffer mixing tank is provided with a first gas inlet, a second gas inlet, and a first mixed gas outlet;
• and
• a gas outlet of the CO2 heat exchanger is communicated with the first gas inlet through the first pipe, and the first solenoid valve and the first thermal mass flow meter are both arranged on the first pipe;
• a gas outlet of the C4F7N heat exchanger is communicated with the second gas inlet through the second pipe, and the second solenoid valve and the second thermal mass flow meter are both arranged on the second pipe;
• and the first mixed gas outlet is communicated with an inlet end of the C4F7N/CO2 mixed gas output pipeline structure;
• wherein the C4F7N/CO2 partial pressure mixing pipeline structure comprises a plurality of partial pressure mixing tanks each having a gas inlet, a third pipe, a fourth pipe, a fifth pipe, a third solenoid valve, a fourth solenoid valve, and a first proportional valve;
• the third solenoid valve and the fourth solenoid valve are not opened at the same time;
• wherein the plurality of the partial pressure mixing tanks are arranged in parallel;
• a gas inlet of the third pipe is communicated with the CO2 input port, a gas inlet of the fourth pipe is communicated with the C4F7N input port, and a gas outlet of the third pipe and a gas outlet of the fourth pipe are both communicated with a gas inlet of the fifth pipe;
• a gas outlet of the fifth pipe is communicated with the gas inlets of the partial pressure mixing tanks;
• the third solenoid valve is arranged on the third pipe, the fourth solenoid valve is arranged on the fourth pipe, and the first proportional valve is arranged on the fifth pipe;
• wherein a differential pressure sensor is provided on each of the partial pressure mixing tanks to monitor online a pressure of a gas in the partial pressure mixing tanks;
• a weight sensor is provided at a bottom of each of the partial pressure mixing tanks to monitor online a weight of the gas in the partial pressure mixing tanks;
• wherein an accuracy of C4F7N and CO2 gas preparation is monitored by the pressure of the gas and the weight of the gas.