Piping apparatus having harmful gas treatment device, design method therefor, and harmful gas treatment facility comprising same

A harmful gas treatment facility comprising:

• a vacuum pump for discharging exhaust gas including a harmful gas generated in a process chamber;
• an exhaust pipe providing a passage through which the exhaust gas discharged by the vacuum pump flows;
• and
• a harmful gas treatment device positioned on the exhaust pipe so as to treat a harmful gas contained in the exhaust gas,
• wherein the harmful gas treatment device comprises a heating means for increasing the temperature of the exhaust gas so as to prevent a sublimable component, from among components included in the exhaust gas, from being sublimated and accumulated inside the exhaust pipe, and
• the heating means is positioned on a section including a sublimation condition occurrence point of the exhaust pipe, at which a sublimation condition of the sublimable component occurs, and an upstream side of the sublimation condition occurrence point on the exhaust pipe, and
• the sublimation condition is a temperature condition for the pressure of the sublimable component,
• wherein the heating means comprises a plasma reaction part for decomposing the harmful gas using a plasma reaction.

A piping apparatus in which exhaust gas discharged from a process chamber by a vacuum pump flows, the piping apparatus comprising:

• an exhaust pipe providing a passage through which the exhaust gas discharged by the vacuum pump flows;
• and
• a harmful gas treatment device positioned on the exhaust pipe so as to treat a harmful gas contained in the exhaust gas,
• wherein the harmful gas treatment device comprises a heating means for increasing the temperature of the exhaust gas so as to prevent a sublimable component, from among components included in the exhaust gas from being sublimated and accumulated inside the exhaust pipe, and
• the heating means is positioned on a section including a sublimation condition occurrence point, at which a sublimation condition of the sublimable component occurs, and an upstream side of the sublimation condition occurrence point on the exhaust pipe,
• wherein the heating means comprises a plasma reaction part for decomposing the harmful gas using a plasma reaction.