# US 12,120,938 B1 · Methods of fabricating OLED panel with inorganic pixel encapsulating barrier

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- Number: US 12,120,938 B1
- Document ID: US12120938B1
- Status: Granted
- Kind: B1
- Application number: 18/390,720
- Filed: 2023-12-20
- Granted: 2024-10-15
- Earliest claimed: 2020-09-04
- Assignees: Applied Materials, Inc.
- Applicants: Applied Materials, Inc.
- Inventors: Ji Young Choung; Dieter Haas; Yu-hsin Lin; Jungmin Lee; Seong Ho Yoo; Si Kyoung Kim
- Web page: https://patentgrep.com/patent/US12120938B1

## CPC

- H10K 59/173: comprising banks or shadow masks
- H10K 50/84: Passivation; Containers; Encapsulations
- H10K 50/844: Encapsulations
- H10K 59/122: Pixel-defining structures or layers, e.g. banks
- H10K 59/1315: {comprising structures specially adapted for lowering the resistance}
- H10K 59/80522: {combined with auxiliary electrodes}
- H10K 59/873: {Encapsulations}
- H10K 71/00: Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K 59/1201: {Manufacture or treatment}
- H10K: ORGANIC ELECTRIC SOLID-STATE DEVICES

## Abstract

Embodiments described herein relate to sub-pixel circuits and methods of forming sub-pixel circuits that may be utilized in a display such as an organic light-emitting diode (OLED) display. The device includes a plurality of sub-pixels, each sub-pixel of the plurality of sub-pixels defined by adjacent pixel-defining layer (PDL) structures with inorganic overhang structures disposed on the PDL structures, each sub-pixel having an anode, organic light-emitting diode (OLED) material disposed on the anode, and a cathode disposed on the OLED material. The device is made by a process including the steps of: depositing the OLED material and the cathode by evaporation deposition, and depositing an encapsulation layer disposed over the cathode.

## Claims

### Claim 1

A device, comprising:
a substrate;
a plurality of overhang structures, the overhang structures having an upper portion having a bottom surface wider than a top surface of a lower portion, adjacent overhang structures defining wells of sub-pixels of the device; and
a plurality of sub-pixels, each sub-pixel comprising:
an anode;
an organic light-emitting diode (OLED) material disposed over the anode;
a cathode disposed over the OLED material;
first encapsulation layer disposed over the cathode and past an endpoint of the cathode, wherein the first encapsulation layer extends under at least a portion of the overhang structures along a sidewall of the lower portion and contacts the bottom surface of the upper portion of the overhang structures; and
a second encapsulation layer disposed over the first encapsulation layer, wherein the second encapsulation layer is disposed within a well of each sub-pixel and directly on the upper portion of the overhang structures.

### Claim 2 (depends on 1)

The device of claim 1, wherein the first encapsulation layer further extends along a sidewall of the upper portion.

### Claim 3 (depends on 2)

The device of claim 2, wherein the first encapsulation layer further extends over an upper surface of the upper portion.

### Claim 4 (depends on 1)

The device of claim 1, wherein the upper portion includes an underside edge extending past the sidewall of the lower portion.

### Claim 5 (depends on 4)

The device of claim 4, wherein the first encapsulation layer contacts the underside edge of the upper portion.

### Claim 6 (depends on 1)

The device of claim 1, wherein the device comprises a dot-type architecture or a line-type architecture.

### Claim 7 (depends on 1)

The device of claim 1, wherein the overhang structures comprise a non-conductive inorganic material.

### Claim 8 (depends on 7)

The device of claim 7, wherein the non-conductive inorganic material comprises an inorganic silicon-containing material.

### Claim 9 (depends on 1)

The device of claim 1, wherein the overhang structures comprise a conductive inorganic material.

### Claim 10 (depends on 9)

The device of claim 9, wherein the conductive inorganic material comprises a metal-containing material.

### Claim 11 (depends on 10)

The device of claim 10, wherein the metal-containing material comprises copper, titanium, aluminum, molybdenum, silver, indium tin oxide, indium zinc oxide, or combinations thereof.

### Claim 12

A device, comprising:
a substrate,
a plurality of overhang structures, the overhang structures defining wells of sub-pixels of the device;
an organic light-emitting diode (OLED) material disposed on a top surface of the overhang structures and between adjacent overhang structures;
a cathode disposed over the OLED material disposed over the top surface of the overhang structures and between the adjacent overhang structures;
first encapsulation layer disposed over the cathode and past an endpoint of the cathode, wherein the first encapsulation layer extends under at least a portion of the overhang structures, contacts a sidewall of the overhang structures, and is disposed over the top surface of the overhang structures; and
a second encapsulation layer disposed over the first encapsulation layer, wherein the second encapsulation layer is disposed within a well of each sub pixel and directly on the top surface of the overhang structures.

### Claim 13 (depends on 12)

The device of claim 12, wherein the overhang structures comprise an inorganic silicon-containing material.

### Claim 14 (depends on 12)

The device of claim 12, wherein the overhang structures comprise a metal-containing material.

### Claim 15 (depends on 12)

The device of claim 12, wherein the first encapsulation layer separates the OLED material and the cathode between the adjacent overhang structures from the OLED material and the cathode disposed over the top surface of the overhang structures.

### Claim 16 (depends on 12)

The device of claim 12, wherein the OLED material comprises a hole injection layer (HIL), a hole transport layer (HTL), an emissive layer (EML), and an electron transport layer (ETL).

### Claim 17

A device, comprising:
a substrate; and
a plurality of overhang structures disposed over the substrate, the overhang structures defining wells therebetween, the wells correspond to sub-pixels of the device, each well comprising:
an organic light-emitting diode (OLED) material;
a cathode disposed over the OLED material;
first encapsulation layer disposed over the cathode and past an endpoint of the cathode, wherein the first encapsulation layer extends under at least a portion of the overhang structures, contacts a sidewall of the overhang structures, and is disposed over a top surface of the overhang structures; and
a second encapsulation layer disposed over the first encapsulation layer, wherein the second encapsulation layer is disposed within a respective well of each sub pixel and directly on the top surface of the overhang structures.