# US 12,120,783 B2 · Ceramic heater

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- Number: US 12,120,783 B2
- Document ID: US12120783B2
- Status: Granted
- Kind: B2
- Application number: 17/304,748
- Filed: 2021-06-25
- Published: 2022-04-07
- Granted: 2024-10-15
- Earliest claimed: 2020-10-02
- Assignees: NGK Insulators, Ltd.
- Applicants: Ngk Insulators, Ltd.
- Inventors: Hiroshi Takebayashi; Joyo Ito; Daisuke Inoue
- Web page: https://patentgrep.com/patent/US12120783B2

## CPC

- H05B 3/143: {applied to semiconductors, e.g. wafers heating (H05B3/0047 takes precedence)}
- H05B 3/03: Electrodes
- H05B 3/08: having electric connections specially adapted for high temperatures
- H05B 3/18: the conductor being embedded in an insulating material
- H05B 3/283: {the insulating material being an inorganic material, e.g. ceramic}
- H10P 72/0432: {mainly by conduction}
- H10P 72/0434: {mainly by convection}
- H10P 72/72: using electrostatic chucks
- H05B 2203/002: Heaters using a particular layout for the resistive material or resistive elements
- H05B: ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10

## Abstract

A ceramic heater including a heater electrode embedded in a plate made of ceramic, wherein, of the heater electrode, a specific area surrounding portion surrounding a specific temperature area in which temperature of the plate becomes low has a smaller thickness than a normal portion of the heater electrode.

## Claims

### Claim 1

A ceramic heater including a heater electrode embedded in a plate made of ceramic,
wherein, of the heater electrode, a specific area surrounding portion surrounding a specific temperature area in which temperature of the plate becomes low has a smaller thickness than a normal portion of the heater electrode,
wherein the specific temperature area is a midpoint of a segment connecting a pair of terminals of the heater electrode, the terminals being arranged oppositely apart from each other,
the heater electrode includes multiple resistance heating line portions, the multiple resistance heating line portions including a resistance heating line portion that extends from each of the pair of terminals in opposite directions and one or more resistance heating line portions that are disposed around the pair of terminals, and
assuming that a number n (n is an integer of two or more) of round shape lines centered at the midpoint with different sizes are drawn and part of one of the multiple resistance heating line portions which is k-th (k is an integer of 1 or more and n or less) closest to the midpoint, the part being included within the k-th smallest round shape line, is defined as a k-th small region, the specific area surrounding portion is formed of a region consisting of a collection of the first to n-th small regions,
wherein an m-th (m is an integer of 1 or more and (n−1) or less) small region of the specific area surrounding portion is thinner than an (m+1)-th small region; and
wherein the round shape lines centered at the midpoint formed from the multiple resistance heating line portions of the heater electrode are in the shape of an ellipse, or an oblong circle in the specific area surrounding portion of the specific temperature area.

### Claim 2 (depends on 1)

The ceramic heater according to claim 1, wherein the normal portion of the heater electrode is a portion adjacent to the specific area surrounding portion.

### Claim 3 (depends on 1)

The ceramic heater according to claim 1, wherein a width of the heater electrode in the specific area surrounding portion is equal to a width of the heater electrode in the normal portion.

### Claim 4 (depends on 1)

The ceramic heater according to claim 1, wherein the heater electrode has a structure in which multiple resistance heating layers are laminated, and
the number of the laminated resistance heating layers is smaller in the specific area surrounding portion than in the normal portion.