# US 12,120,781 B2 · Method of manufacturing holding device, method of manufacturing structure for holding device, and holding device > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 12,120,781 B2 - Document ID: US12120781B2 - Status: Granted - Kind: B2 - Application number: 17/257,406 - Filed: 2020-03-27 - Published: 2021-09-02 - Granted: 2024-10-15 - Earliest claimed: 2019-04-16 - Assignees: Niterra Co., Ltd. - Applicants: Ngk Spark Plug Co., Ltd. - Inventors: Hideki Uematsu; Junji Suzuki; Kazuki Izumihara; Yuji Kawamura - Web page: https://patentgrep.com/patent/US12120781B2 ## CPC - H05B 3/03: Electrodes - H10P 72/0432: {mainly by conduction} - H02N 13/00: Clutches or holding devices using electrostatic attraction, e.g. using Johnson-Rahbek effect - H05B 1/0233: {for semiconductors manufacturing} - H05B 3/06: Heater elements structurally combined with coupling elements or holders - H05B 3/265: {the insulating base being an inorganic material, e.g. ceramic (H05B3/262 takes precedence)} - H05B 3/283: {the insulating material being an inorganic material, e.g. ceramic} - H10P 72/0434: {mainly by convection} - H10P 72/72: using electrostatic chucks - H10P 72/722: {Details of electrostatic chucks} - H05B 2203/017: Manufacturing methods or apparatus for heaters - H05B: ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 - H02N: ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR ## Abstract A holding device that holds an object on a first surface of a first portion of a plate-shaped member includes a heater pattern formed on a ceramic green sheet and a cover layer covering the heater pattern. A second portion of the plate-shaped member and a heater electrode are manufactured by firing a layered body constituted by a plurality of ceramic green sheets. A second joining portion joins the second portion and a base member. A temperature distribution of a second surface of the second portion is measured while cooling with a cooling mechanism of the base member and supplying power to the heater electrode. Based on a result of the measurement, an electrical resistance of the heater electrode is adjusted by removing a portion of the heater electrode together with the cover layer. A first joining portion joins the second portion and the first portion of the plate-shaped member. ## Claims ### Claim 1 A holding device that holds an object on a first surface of a plate-shaped member, the holding device comprising: the plate-shaped member that has the first surface substantially orthogonal to a first direction and a second surface on a side opposite to the first surface, the plate-shaped member including a first portion that includes the first surface and a fifth surface on a side opposite to the first surface, a second portion that includes the second surface, a fourth surface facing the fifth surface, and a portion made of a ceramic, and a first joining portion that is disposed between the fifth surface and the fourth surface, and that joins the fifth surface and the fourth surface to each other; a heater electrode that is disposed at the second portion of the plate-shaped member and that is formed from a resistance heater; a base member that has a third surface, that is disposed so that the third surface is positioned on a side of the second surface of the plate-shaped member, and that includes a cooling mechanism; and a second joining portion that is disposed between the second surface of the plate-shaped member and the third surface of the base member, and that joins the plate-shaped member and the base member to each other, wherein a groove at which a portion of a surface defining the groove is constituted by a portion of a surface of the heater electrode is formed in the fourth surface among surfaces of the second portion of the plate-shaped member, and wherein when electric power is supplied to the heater electrode and cooling is performed with the cooling mechanism, and when a difference between a temperature of the heater electrode and a temperature of the cooling is greater than or equal to 50° C., a difference between a maximum value and a minimum value of a temperature at the first surface is less than or equal to 3.5° C. ### Claim 2 (depends on 1) The holding device according to claim 1, wherein, in at least one section that is parallel to the first direction, an edge portion defining an opening of the groove has a round shape. ### Claim 3 (depends on 1) The holding device according to claim 1, wherein, in at least one section that is parallel to the first direction, the groove has a shape in which a depth of a deepest portion is deeper than a maximum value of a distance in the first direction from a portion of the fourth surface other than the groove to each position on a surface of the heater electrode. ### Claim 4 (depends on 1) The holding device according to claim 1, wherein in at least one section that is parallel to the first direction, the groove has a shape whose width in a direction orthogonal to the first direction becomes narrower with decreasing distance from a deep position. ### Claim 5 (depends on 1) The holding device according to claim 1, wherein, in at least one section that is parallel to the first direction, the groove has a shape in which a line constituting a surface defining the groove has no more than one bending point. ### Claim 6 (depends on 1) The holding device according to claim 1, wherein a portion of the first joining portion exists in the groove.