# US 12,119,559 B2 · Antenna including at least one microstrip line phase shifting unit having a photo-dielectric layer and a light guiding structure configured to guide light into the photo-dielectric layer

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- Number: US 12,119,559 B2
- Document ID: US12119559B2
- Status: Granted
- Kind: B2
- Application number: 17/375,310
- Filed: 2021-07-14
- Published: 2022-09-08
- Granted: 2024-10-15
- Earliest claimed: 2021-03-02
- Assignees: Shanghai Tianma Micro-Electronics Co., Ltd.
- Applicants: Shanghai Tianma Micro-Electronics Co., Ltd.
- Inventors: Zhenyu Jia; Kerui Xi; Zhen Liu; Baiquan Lin; Dengming Lei; Feng Qin; Jing Wang; Liping Zhang
- Web page: https://patentgrep.com/patent/US12119559B2

## CPC

- H01Q 3/2676: {Optically controlled phased array}
- H01Q 3/34: by electrical means (active lenses or reflecting arrays H01Q3/46)
- H01P 1/182: {Waveguide phase-shifters (H01P1/181, H01P1/185, H01P1/19 take precedence)}
- H01P 1/184: {Strip line phase-shifters (H01P1/181, H01P1/185, H01P1/19 take precedence)}
- H01Q 3/36: with variable phase-shifters
- H01Q 15/147: {provided with means for controlling or monitoring the shape of the reflecting surface (for scanning H01Q3/01; aerials or aerial systems providing multiple beamwidths H01Q25/002)}
- H01Q 15/148: {with means for varying the reflecting properties (H01Q15/147 takes precedence)}
- H01Q: ANTENNAS, i.e. RADIO AERIALS (radiators or antennas for microwave heating H05B6/72)
- H01P: WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE (operating at optical frequencies G02B)

## Abstract

Provided are a phase shifter, a preparation method thereof, and an antenna. The phase shifter includes at least one phase shifting unit, and the phase shifting unit includes a microstrip line, a photo-dielectric layer, a ground electrode, and at least one light guiding structure; the microstrip line is located on a side of the photo-dielectric layer, and the ground electrode is located on a side of the photo-dielectric layer facing away from the microstrip line; the light-guiding structure at least partially overlaps the photo-dielectric layer, and the light-guiding structure is configured to guide light into the photo-dielectric layer.

## Claims

### Claim 1

A phase shifter, comprising:
at least one phase shifting unit, wherein each phase shifting unit of the at least one phase shifting unit comprises a microstrip line, a photo-dielectric layer, a ground electrode, and at least one light guiding structure,
wherein the microstrip line is located on a side of the photo-dielectric layer, and the ground electrode is located on a side of the photo-dielectric layer facing away from the microstrip line; and
the at least one light guiding structure at least partially overlaps the photo-dielectric layer, and the at least one light guiding structure is configured to guide light into the photo-dielectric layer,
wherein each light guiding structure of the at least one light guiding structure comprises a light output opening, and a vertical projection of the light output opening on a plane where the microstrip line is located does not overlap the microstrip line, and
wherein along a direction parallel to a plane where the photo-dielectric layer is located, the light output opening comprises a first boundary, and the first boundary is a boundary of a side of the light output opening facing the microstrip line; the microstrip line comprises a second boundary, the second boundary is a boundary of a side of the microstrip line facing the light output opening, and a shortest distance between the first boundary and the second boundary is D1, wherein 0<D1≤2 mm.

### Claim 2 (depends on 1)

The phase shifter of claim 1, wherein
the at least one light guiding structure is located on a side of the microstrip line facing away from the ground electrode, and/or the at least one light guiding structure is located on a side of the microstrip line facing the ground electrode.

### Claim 3 (depends on 1)

The phase shifter of claim 1, wherein
the phase shifter further comprises a second substrate, and the second substrate is located on a side of the ground electrode facing away from the microstrip line.

### Claim 4 (depends on 1)

The phase shifter of claim 1, wherein
the phase shifter further comprises a first substrate, and the first substrate is located on a side of the microstrip line facing away from the ground electrode; and
the at least one light guiding structure is located in the first substrate.

### Claim 5 (depends on 1)

The phase shifter of claim 1, wherein
the phase shifter further comprises a first substrate, and the first substrate is located on a side of the microstrip line facing away from the ground electrode;
the first substrate comprises a first sub-substrate and a second sub-substrate, and the second sub-substrate is located on a side of the first sub-substrate facing away from the ground electrode;
each light guiding structure of the at least one light guiding structure comprises a groove and a metal reflective layer;
the groove is located on a side of the first sub-substrate facing away from the ground electrode, and/or the groove is located on a side of the second sub-substrate facing the ground electrode; and
the metal reflective layer covers a surface of the groove, and the light output opening is disposed on the metal reflective layer on a side of the groove facing the photo-dielectric layer.

### Claim 6 (depends on 5)

The phase shifter of claim 5, wherein
the groove is located on a side of the first sub-substrate facing away from the ground electrode;
the groove comprises a first top surface and a first sidewall, and the first top surface is located on a side of the groove facing the second sub-substrate;
the metal reflective layer comprises a first metal reflective layer and a second metal reflective layer, the first metal reflective layer covers the first sidewall, and the second metal reflective layer covers the first top surface; the light output opening is disposed on the first metal reflective layer; and
the first sub-substrate is a flexible substrate, and the groove is formed by an imprinting process.

### Claim 7 (depends on 5)

The phase shifter of claim 5, wherein
the groove is located on a side of the second sub-substrate facing the ground electrode;
the groove comprises a second top surface and a second sidewall, and the second top surface is located on a side of the groove facing the first sub-substrate;
the metal reflective layer comprises a first metal reflective layer and a second metal reflective layer, the first metal reflective layer covers the second top surface, and the second metal reflective layer covers the second sidewall; the light output opening is disposed on the first metal reflective layer; and
the second sub-substrate is a flexible substrate, and the groove is formed by an imprinting process.

### Claim 8 (depends on 1)

The phase shifter of claim 1, wherein
the phase shifter further comprises a first substrate, and the first substrate is located on a side of the microstrip line facing away from the ground electrode;
the first substrate comprises a first sub-substrate, a second sub-substrate, and a third sub-substrate, the third sub-substrate is located on a side of the first sub-substrate facing away from the ground electrode, and the second sub-substrate is located on a side of the third sub-substrate facing away from the first sub-substrate;
the third sub-substrate comprises a first hollow portion, a third metal reflective layer is provided on a side of the first hollow portion facing the first sub-substrate, a fourth metal reflective layer is provided on a side of the first hollow portion facing the second sub-substrate, and the light output opening is provided on the third metal reflective layer;
a light blocking layer is provided on a sidewall of the first hollow portion; and
a material of the third sub-substrate is an opaque material.

### Claim 9 (depends on 1)

The phase shifter of claim 1, wherein
the phase shifter further comprises a spacing structure, wherein the spacing structure is located between the microstrip line and the ground electrode; and
the spacing structure is located among the at least one phase shifting unit.

### Claim 10

A preparation method of a phase shifter comprising:
providing a photo-dielectric layer; and
preparing a microstrip line on a side of the photo-dielectric layer, preparing a ground electrode on a side of the photo-dielectric layer facing away from the microstrip line, and preparing at least one light guiding structure to form at least one phase shifting unit, wherein the at least one light guiding structure at least partially overlaps the photo-dielectric layer,
wherein before preparing the at least one light guiding structure, the method further comprises:
providing a first substrate, wherein the first substrate comprises a first sub-substrate and a second sub-substrate; and
wherein preparing the at least one light guiding structure comprises:
preparing a groove on a side of the first sub-substrate, and preparing a first metal reflective layer on a side of the groove;
etching the first metal reflective layer to form a light output opening;
preparing a second metal reflective layer on a side of the second sub-substrate; and
bonding the first sub-substrate and the second sub-substrate to form the at least one light guiding structure in the first substrate.

### Claim 11

An antenna comprising a phase shifter, wherein the phase shifter comprises:
at least one phase shifting unit, wherein each phase shifting unit of the at least one phase shifting unit comprises a microstrip line, a photo-dielectric layer, a ground electrode, and at least one light guiding structure,
wherein the microstrip line is located on a side of the photo-dielectric layer, and the ground electrode is located on a side of the photo-dielectric layer facing away from the microstrip line; and
the at least one light guiding structure at least partially overlaps the photo-dielectric layer, and the at least one light guiding structure is configured to guide light into the photo-dielectric layer,
wherein each light guiding structure of the at least one light guiding structure comprises a light output opening, and a vertical projection of the light output opening on a plane where the microstrip line is located does not overlap the microstrip line, and
wherein along a direction parallel to a plane where the photo-dielectric layer is located, the light output opening comprises a first boundary, and the first boundary is a boundary of a side of the light output opening facing the microstrip line; the microstrip line comprises a second boundary, the second boundary is a boundary of a side of the microstrip line facing the light output opening, and a shortest distance between the first boundary and the second boundary is D1, wherein 0<D1≤2 mm.

### Claim 12 (depends on 11)

The antenna of claim 11, wherein
the antenna further comprises a light source, and the light source is configured to emit light;
the light source comprises at least one sub-light-source group, and the at least one sub-light-source group corresponds to the at least one phase shifting unit; each sub-light-source group of the at least one sub-light-source group comprises at least one sub-light-source, and the at least one sub-light-source corresponds to the at least one light guiding structure;
each of the at least one sub-light-source is disposed at the light input opening of a respective one of the at least one light guiding structure; and
the light source further comprises a light source control module, each of the at least one sub-light-source is connected to the light source control module, and the light source control module is configured to independently control brightness of the at least one sub-light-source.

### Claim 13 (depends on 11)

The antenna of claim 11, wherein
the antenna further comprises a radiation electrode, and the ground electrode at least partially overlaps the radiation electrode.

### Claim 14 (depends on 13)

The antenna of claim 13, wherein
the phase shifter further comprises a second substrate, and the second substrate is located on a side of the ground electrode facing away from the microstrip line;
the radiation electrode is located on a side of the second substrate facing away from the microstrip line; and
the ground electrode comprises a second hollow portion, and a vertical projection of the radiation electrode on a plane where the ground electrode is located covers the second hollow portion.

### Claim 15 (depends on 14)

The antenna of claim 14, wherein
the second substrate comprises a fourth sub-substrate and a fifth sub-substrate, and the fourth sub-substrate is located on a side of the fifth sub-substrate facing away from the microstrip line;
the radiation electrode is located on a side of the fourth sub-substrate facing away from the fifth sub-substrate, and the ground electrode is located on a side of the fifth sub-substrate facing away from the fourth sub-substrate; and
the antenna further comprises a feed network, the feed network and the microstrip line are arranged in a same layer, and the feed network is connected to the microstrip line.

### Claim 16 (depends on 15)

The antenna of claim 15, wherein
the phase shifter further comprises the second substrate, and the second substrate is located on a side of the ground electrode facing away from the microstrip line;
the antenna further comprises a feed network, the feed network is located on a side of the second substrate facing away from the microstrip line; and
the ground electrode comprises a third hollow portion, and a vertical projection of the feed network on the plane where the ground electrode is located covers the third hollow portion.