# US 12,119,309 B2 · Enhanced bonding between III-V material and oxide material > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 12,119,309 B2 - Document ID: US12119309B2 - Status: Granted - Kind: B2 - Application number: 17/683,725 - Filed: 2022-03-01 - Published: 2022-08-25 - Granted: 2024-10-15 - Earliest claimed: 2018-04-27 - Assignees: OpenLight Photonics, Inc. - Applicants: OpenLight Photonics, Inc. - Inventors: Avi Feshali; John Hutchinson - Web page: https://patentgrep.com/patent/US12119309B2 ## CPC - H10P 90/1914: {using bonding} - H10W 42/00: Arrangements for protection of devices (arrangements for thermal protection H10W40/00) - H10D 62/115: {Dielectric isolations, e.g. air gaps} - H10D 62/85: being Group III-V materials, e.g. GaAs - H10D 86/201: {the substrates comprising an insulating layer on a semiconductor body, e.g. SOI (H10D86/40 take precedence)} - H10H 20/018: {Bonding of wafers} - H10P 14/69215: {the material being a silicon oxide, e.g. SiO2} - H10P 50/00: Etching of wafers, substrates or parts of devices - H10W 15/00: Highly-doped buried regions of integrated devices - H10W 15/01: {Manufacture or treatment} - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 - H10W: GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10 - H10D: INORGANIC ELECTRIC SEMICONDUCTOR DEVICES - H10H: INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS ## Abstract When III-V semiconductor material is bonded to an oxide material, water molecules can degrade the bonding if they become trapped at the interface between the III-V material and the oxide material. Because water molecules can diffuse readily through oxide material, and may not diffuse as readily through III-V material or through silicon, forcing the III-V material against the oxide material can force water molecules at the interface into the oxide material and away from the interface. Water molecules present at the interface can be forced during manufacturing through vertical channels in a silicon layer into a buried oxide layer thereby to enhance bonding between the III-V material and the oxide material. Water molecules can be also forced through lateral channels in the oxide material, past a periphery of the III-V material, and, through diffusion, out of the oxide material into the atmosphere. ## Claims ### Claim 1 An integrated circuit comprising: a silicon layer comprising channels; a bonding layer on the silicon layer such that bonding material of the bonding layer fills the channels to form filled channels and forms a bonding surface of the material on the filled channels; and a heterogenous semiconductor layer on the bonding surface of the bonding layer, wherein during manufacturing water in the integrated circuit diffuses away from the heterogenous semiconductor layer through the bonding surface and through the filled channels to increase bonding between the heterogenous semiconductor layer and the bonding material. ### Claim 2 (depends on 1) The integrated circuit of claim 1, wherein the filled channels are filled lateral channels that extend laterally from an interior of the silicon layer. ### Claim 3 (depends on 1) The integrated circuit of claim 1, wherein the filled channels are positioned in a repeating pattern around a periphery of the silicon layer. ### Claim 4 (depends on 2) The integrated circuit of claim 2, wherein the silicon layer further includes filled vertical channels through which the water diffuses. ### Claim 5 (depends on 4) The integrated circuit of claim 4, wherein the water are forced during manufacturing into the filled vertical channels away from the heterogenous semiconductor layer. ### Claim 6 (depends on 5) The integrated circuit of claim 5, wherein the filled vertical channels are etched in a repeating pattern in the silicon layer. ### Claim 7 (depends on 4) The integrated circuit of claim 4, wherein the filled vertical channels are perpendicular to a plane of the silicon layer, and wherein the filled lateral channels extend laterally along the plane of the silicon layer. ### Claim 8 (depends on 1) The integrated circuit of claim 1, wherein the bonding surface is planarized by polishing during manufacturing. ### Claim 9 (depends on 8) The integrated circuit of claim 8, wherein the heterogenous semiconductor layer is included on a heterogenous semiconductor chip. ### Claim 10 (depends on 9) The integrated circuit of claim 9, wherein during manufacturing the heterogenous semiconductor chip is forced against the bonding layer to diffuse the water through the bonding surface and through the filled channels. ### Claim 11 (depends on 1) The integrated circuit of claim 1, wherein the silicon layer is etched to a depth to form the channels. ### Claim 12 (depends on 11) The integrated circuit of claim 11, wherein the silicon layer comprises waveguides formed from etching the silicon layer. ### Claim 13 (depends on 12) The integrated circuit of claim 12, wherein the waveguides are etched at another depth different from the depth to which the channels are etched in the silicon layer. ### Claim 14 (depends on 12) The integrated circuit of claim 12, wherein the waveguides and the channels are etched during manufacturing at a same depth in the silicon layer. ### Claim 15 (depends on 1) The integrated circuit of claim 1, wherein the water are forced through the bonding surface and through the filled channels using ambient pressure and temperature greater than room temperature. ### Claim 16 (depends on 1) The integrated circuit of claim 1, wherein the water are forced through the bonding surface and through filled channels using a vacuum at greater than room temperature. ### Claim 17 (depends on 1) The integrated circuit of claim 1, wherein the integrated circuit comprises a buried oxide layer. ### Claim 18 (depends on 1) The integrated circuit of claim 1, wherein the bonding material comprises an oxide material. ### Claim 19 (depends on 1) The integrated circuit of claim 1, wherein the heterogenous semiconductor layer comprises a III-V semiconductor layer. ### Claim 20 A method of manufacturing an integrated circuit, comprising: forming channels in a silicon layer; forming a bonding layer on the silicon layer such that bonding material of the bonding layer fills the channels to form filled channels and forms a bonding surface of the material on the filled channels; and bonding a heterogenous semiconductor layer on the bonding surface of the bonding layer such that water in the integrated circuit diffuses away from the heterogenous semiconductor layer through the bonding surface and through the filled channels to increase bonding between the heterogenous semiconductor layer and the bonding material.