Thermo-mechanical actuator
AssigneeASML Netherlands B.V.
InventorsBas Jansen, Koen Martin Willem Jan Bos, Johannes Petrus Martinus Bernardus Vermeulen
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AssigneeASML Netherlands B.V.
InventorsBas Jansen, Koen Martin Willem Jan Bos, Johannes Petrus Martinus Bernardus Vermeulen
Estimating the term…
Disclosed is a thermo-mechanical actuator (100) comprising a piezo¬electric module (110), the piezo-electric module comprising at least one piezo-electric element (120), wherein the thermo-mechanical actuator is configured to: •o receive a thermal actuation signal (132) for controlling a thermal behaviour of the piezo-electric module, or •o provide a thermal sensing signal (132) representative of a thermal state of the piezo-electric module, and, wherein the thermo-mechanical actuator is configured to: •o receive a mechanical actuation (134) signal for controlling a mechanical behaviour of the piezo-electric module, or •o provide a mechanical sensing signal (134) representative of a mechanical state of the piezo-electric module.
A thermo-mechanical actuator, comprising:
An object table comprising
Dependencies are inferred from the claim text.