# US 12,117,738 B2 · Reticle detection apparatus, reticle detection method, exposure machine and photolithography device

> Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt

- Number: US 12,117,738 B2
- Document ID: US12117738B2
- Status: Granted
- Kind: B2
- Application number: 17/593,205
- Filed: 2021-04-30
- Published: 2022-09-29
- Granted: 2024-10-15
- Earliest claimed: 2020-05-15
- Assignees: Changxin Memory Technologies, Inc.
- Applicants: Changxin Memory Technologies, Inc.
- Inventors: Xueyu Liang
- Web page: https://patentgrep.com/patent/US12117738B2

## CPC

- G03F 7/70741: {Handling masks outside exposure position, e.g. reticle libraries}
- G03F 7/20: Exposure; Apparatus therefor (photographic printing apparatus for making copies G03B27/00)
- G03F 7/70716: {Stages}
- G03F 7/7085: {Detection arrangement, e.g. detectors of apparatus alignment possibly mounted on wafers, exposure dose, photo-cleaning flux, stray light, thermal load}
- G03F 7/70866: {of mask or workpiece}
- G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G)

## Abstract

A reticle detection apparatus includes a processing unit, an optical detection unit, and an auxiliary detection unit; the optical detection unit is configured to determine whether there is a reticle according to the intensity of the received light; the processing unit is configured to start the auxiliary detection unit when the optical detection unit does not detect the reticle; the auxiliary detection unit is configured to detect whether there is a reticle based on the piezoelectric effect or the acoustoelectric effect; wherein, after the auxiliary detection unit is started, the processing unit is configured to serve the detection result of the auxiliary detection unit as a basis for determining whether there is a reticle.

## Claims

### Claim 1

A reticle detection apparatus, comprising a processing unit, an optical detection unit and an auxiliary detection unit;
the optical detection unit is configured to determine whether there is a reticle according to the intensity of the received light;
the processing unit is configured to start the auxiliary detection unit when the optical detection unit does not detect the reticle;
the auxiliary detection unit is configured to detect whether there is a reticle based on the piezoelectric effect or the acoustoelectric effect;
wherein, after the auxiliary detection unit is started, the processing unit is configured to serve the detection result of the auxiliary detection unit as a basis for determining whether there is a reticle.

### Claim 2 (depends on 1)

The reticle detection apparatus according to claim 1, wherein the optical detection unit comprises a light emitting sub-unit, a light receiving sub-unit, and a light intensity adjustment sub-unit;
the light emitting sub-unit is configured to emit outgoing light;
the light receiving sub-unit is configured to receive reflected light; and
the light intensity adjustment sub-unit is configured to adjust the outgoing light intensity of the outgoing light emitted by the light emitting sub-unit, so that the incident light intensity of the reflected light received by the light receiving sub-unit is greater than a preset light intensity threshold when the auxiliary detection unit detects the reticle.

### Claim 3 (depends on 2)

The reticle detection apparatus according to claim 2, wherein the light emitting sub-unit comprises a first light emitting element, the light receiving sub-unit comprises a first photoresistor, and the light intensity adjustment sub-unit comprises a first servo motor and an adjustment screw driven by the first servo motor.

### Claim 4 (depends on 3)

The reticle detection apparatus according to claim 3, wherein the first light emitting unit is configured to emit light irradiated to the reticle, and the first photoresistor is configured to receive light reflected by the reticle; and the first servo motor is configured to adjust the rotation of the screw when the first photoresistor does not detect the reticle.

### Claim 5 (depends on 2)

The reticle detection apparatus according to claim 2, wherein the optical detection unit further comprises a result prompting sub-unit; and
the result prompting sub-unit is configured to send prompt information when the optical detection unit detects the reticle.

### Claim 6 (depends on 5)

The reticle detection apparatus according to claim 5, wherein the result prompting sub-unit comprises a second light emitting element.

### Claim 7 (depends on 6)

The reticle detection apparatus according to claim 6, further comprising a result detection unit connected to the processing unit; and
the result detection unit is configured to detect whether the result prompting sub-unit sends prompt information.

### Claim 8 (depends on 7)

The reticle detection apparatus according to claim 7, wherein the result detection unit comprises a second photoresistor.

### Claim 9 (depends on 2)

The reticle detection apparatus according to claim 2, further comprising an adjustment detection unit and an intensity recovery unit;
the adjustment detection unit is configured to detect an adjustment record of the optical detection unit after a preset time and transmit the adjustment record to the intensity recovery unit; and
the intensity recovery unit is configured to adjust the outgoing light intensity of the optical detection unit back to a reference light intensity range, when the outgoing light intensity of the optical detection unit is not within the reference light intensity range.

### Claim 10 (depends on 9)

The reticle detection apparatus according to claim 9, wherein the adjustment detection unit and the intensity recovery unit are integrated with the processing unit.

### Claim 11 (depends on 1)

The reticle detection apparatus according to claim 1, wherein the auxiliary detection unit comprises a pressure detection module or a sound wave detection module;
the reticle detection apparatus further comprises a bearing unit, and a bearing surface of the bearing unit is configured to bear the reticle; wherein, the bearing surface comprises a first opening and a second opening, and the pressure detection module or the sound wave detection module detects whether there is a reticle on the bearing surface through the first opening, and the optical detection unit detects whether there is a reticle on the bearing surface through the second opening.

### Claim 12 (depends on 11)

The reticle detection apparatus according to claim 11, wherein the pressure detection module comprises a driving module, a support module, a pressure sensitive module, an elastic module, and an induction module;
the support module is fixedly connected to the movable end of the driving module, the pressure sensitive module is fixed on a side of the support module away from the driving module, and both ends of the elastic module are respectively and fixedly connected to the pressure sensitive module and the induction module; and
when the auxiliary detection unit is started, the movable end of the driving module extends outward, and drives the induction module by the support module, the pressure sensitive module, and the elastic module so that the induction module moves toward the bearing surface; the induction module is configured to pass through the first opening and exceed the bearing surface by a preset distance.

### Claim 13 (depends on 12)

The reticle detection apparatus according to claim 12, wherein the preset distance is equal to or less than 2 mm.

### Claim 14 (depends on 12)

The reticle detection apparatus according to claim 12, wherein the driving module comprises an air cylinder and a cylinder rod driven by the air cylinder, or comprises a second servo motor and a connecting rod driven by the second servo motor; and
the support module comprises a support plate, the pressure sensitive module comprises a pressure sensitive resistor, the elastic module comprises a return spring, and the induction module comprises an induction contact.

### Claim 15 (depends on 1)

A reticle detection method, executed by the reticle detection apparatus according to claim 1, comprising:
determining, by the optical detection unit, whether there is a reticle according to the intensity of the received light;
starting, by the processing unit, the auxiliary detection unit when the optical detection unit does not detect the reticle;
detecting, by the auxiliary detection unit, whether there is a reticle based on the piezoelectric effect or the acoustoelectric effect;
wherein, after the auxiliary detection unit is started, the processing unit serves the detection result of the auxiliary detection unit as a basis for determining whether there is a reticle.

### Claim 16 (depends on 15)

The reticle detection method according to claim 15, wherein the optical detection unit comprises a light emitting sub-unit, a light receiving sub-unit, and a light intensity adjustment sub-unit; and the reticle detection method further comprises:
emitting outgoing light by the light emitting sub-unit;
receiving reflected light by the light receiving sub-unit; and
adjusting, by the light intensity adjustment sub-unit, the outgoing light intensity of the outgoing light emitted by the light emitting sub-unit, so that the incident light intensity of the reflected light received by the light receiving sub-unit is greater than a preset light intensity threshold when the auxiliary detection unit detects the reticle.

### Claim 17 (depends on 15)

The reticle detection method according to claim 15, wherein the reticle detection apparatus further comprises an adjustment detection unit and an intensity recovery unit; and the reticle detection method further comprises:
by the adjustment detection unit, detecting an adjustment record of the optical detection unit after a preset time and transmitting the adjustment record to the intensity recovery unit; and
adjusting, by the intensity recovery unit, the outgoing light intensity of the optical detection unit back to a reference light intensity range, when the outgoing light intensity of the optical detection unit is not within the reference light intensity range.

### Claim 18 (depends on 1)

An exposure machine, comprising the reticle detection apparatus according to claim 1.

### Claim 19 (depends on 18)

A photolithography device, comprising the exposure machine according to claim 18.

### Claim 20 (depends on 19)

The photolithography device according to claim 19, further comprising a machine processor; and
the processing unit is communicatively connected to the machine processor.