# US 12,117,735 B2 · Method of determining overlay error during semiconductor fabrication

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- Number: US 12,117,735 B2
- Document ID: US12117735B2
- Status: Granted
- Kind: B2
- Application number: 17/673,155
- Filed: 2022-02-16
- Published: 2023-08-17
- Granted: 2024-10-15
- Earliest claimed: 2022-02-16
- Assignees: Nanya Technology Corporation
- Applicants: Nanya Technology Corporation
- Inventors: Kai Zhang
- Web page: https://patentgrep.com/patent/US12117735B2

## CPC

- G03F 7/70633: {Overlay, i.e. relative alignment between patterns printed by separate exposures in different layers, or in the same layer in multiple exposures or stitching}
- G03F 7/7065: {Defects, e.g. optical inspection of patterned layer for defects}
- G03F 7/70683: {Mark designs}
- H10W 46/00: Marks applied to devices, e.g. for alignment or identification
- H10W 46/301: {for alignment}
- H10W 46/503: {Located in scribe lines}
- G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G)
- H10W: GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10

## Abstract

The present application provides a method of determining an overlay error during a semiconductor fabrication. The method includes steps of forming a first structural layer comprising a target feature over a wafer; forming a second structural layer comprising a first axis, a second axis and a pair of alignment features over the first structural layer, wherein the pair of alignment features are disposed at the first and the second axes, respectively; and determining a relative displacement of the first and second structural layers using a position of the first axis relative to the target feature and a position of the second axis relative to the target feature.

## Claims

### Claim 1

A method of determining an overlay error during a semiconductor fabrication, comprising:
forming a first structural layer deposited over a wafer, the first structural layer comprising first patterned structures and a target feature;
forming a second structural layer deposited over the first structural layer, the second structural layer comprising second patterned structures correspondingly over the first patterned structures, a first axis, a second axis and a pair of alignment features, wherein the pair of alignment features are disposed at the first and the second axes, wherein an intersection of the first and second axes is deposited correspondingly over the target feature; and
determining a relative displacement of the first and second structural layers using a position of the first axis relative to the target feature and a position of the second axis relative to the target feature.

### Claim 2 (depends on 1)

The method of claim 1, further comprising:
recording at least one image of a substrate comprising the wafer, the first structural layer and the second structural layer,
wherein the relative displacement of the first and second structural layers is determined based on the at least one image.

### Claim 3 (depends on 1)

The method of claim 1, wherein the first axis is formed to bisect one of the pair of alignment features; the second axis, crossing the first axis, is formed to bisect the another one of the pair of alignment features; and the first structural layer and the second structural layer are properly aligned when an intersection of the first axis and the second axis overlaps the target feature.

### Claim 4 (depends on 1)

The method of claim 1, wherein the first axis is formed to bisect one of the pair of alignment features; the second axis, crossing the first axis, is formed to bisect the another one of the pair of alignment features; and the first structural layer and the second structural layer are not properly aligned when an intersection of the first axis and the second axis is offset from the target feature.

### Claim 5 (depends on 1)

The method of claim 1, wherein the first structural layer and the second structural layer are not properly aligned when one of the first axis and the second axis is offset from the target feature.

### Claim 6 (depends on 1)

Method of claim 1, wherein the second structural layer is formed using a lithography process.

### Claim 7 (depends on 1)

The method of claim 1, wherein the second structural layer comprises photoresist material.

### Claim 8 (depends on 1)

The method of claim 1, wherein the first axis, the second axis, the pair of alignment features and the target feature are located in at least one scribe line on the wafer.

### Claim 9 (depends on 1)

The method of claim 1, wherein a shortest distance between the first axis and the second alignment feature is equal to a shortest distance between the second axis and the first alignment feature.

### Claim 10 (depends on 1)

The method of claim 1, wherein the target feature comprises two line segments, and the first and second axes overlap the line segments respectively when the first layer and the second layer are properly aligned.

### Claim 11 (depends on 1)

The method of claim 1, wherein the first axis is orthogonal to the second axis.

### Claim 12 (depends on 1)

The method of claim 1, wherein the target feature has a cross shape.

### Claim 13 (depends on 1)

The method of claim 1, wherein the first alignment feature and the second alignment feature are respectively composed of repetitious micro-structures.

### Claim 14 (depends on 1)

The method of claim 1, wherein the first alignment feature and the second alignment feature respectively have a square profile and are composed of a plurality of square micro-structures, and the micro-structures are separated from each other via a pair of void zones.

### Claim 15 (depends on 14)

The method of claim 14, wherein the void zones have a first width, and the micro-structures have a second width greater than the first width.

### Claim 16 (depends on 14)

The method of claim 14, wherein the pair of the void zones comprises a horizontal void zone and a longitudinal void zone, the first axis extends through the horizontal void zone of the first alignment feature located at the first axis, and the second axis extends through the longitudinal void zone of the second alignment feature located at the second axis.