Silicon-based modulator with different transition zone thicknesses
AssigneeCiena Corporation
InventorsAlexandre Delisle-Simard, Yves Painchaud
Life of this patent
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Abstract
An optical modulator includes a waveguide core; a first transition zone located between a first side of the waveguide core and a first electrical contact region; and a second transition zone located between a second side of the waveguide core and a second electrical contact region, wherein one or more of the first transition zone and second transition zone has a variable thickness. The variable thickness is confined to the one or more of the first transition zone and second transition zone. The variable thickness removes a portion of the highly doped first transition zone and the highly doped second transition zone thereby reducing contact resistance.
Claims20
An optical modulator comprising:
- a waveguide core;
- a first transition zone located between a first side of the waveguide core and a first electrical contact region;
- and
- a second transition zone located between a second side of the waveguide core and a second electrical contact region,
- wherein one or more of the first transition zone and second transition zone has a variable thickness, and
- wherein the variable thickness includes an increasing thickness at or near one or more of the first electrical contact region and the second electrical contact region.
An optical modulator comprising:
- a waveguide core;
- a first transition zone located between a first side of the waveguide core and a first electrical contact region;
- and
- a second transition zone located between a second side of the waveguide core and a second electrical contact region,
- wherein one or more of the first transition zone and second transition zone has a variable thickness, wherein the first transition zone and second transition zone have a same thickness as the waveguide core where they meet in a longitudinal direction that is an optical propagation direction, and wherein the first transition zone and second transition zone have a same thickness as the first electrical contact region and the second electrical contact region, respectively, where they meet in the longitudinal direction.
Dependencies are inferred from the claim text.