Sensor device

A sensor device comprising:

• an IC chip having a first principal surface and a second principal surface;
• a sensor element disposed over the first principal surface of the IC chip;
• a resin-based adhesive layer interposed between the first principal surface of the IC chip and the sensor element;
• and
• a conductive layer interposed between the first principal surface of the IC chip and the sensor element and facing the sensor element via the resin-based adhesive layer,
• the sensor element including:
• a moving part including a moving electrode;
• a fixed part including a fixed electrode configured to form electrostatic capacitance between the moving electrode and the fixed electrode itself;
• a first terminal connected to the moving electrode;
• and
• a second terminal connected to the fixed electrode,
• the IC chip including:
• a signal processor configured to process a detection signal supplied from the second terminal;
• a first voltage generator configured to generate a first voltage as an operating voltage for the signal processor;
• and
• a second voltage generator configured to generate a second voltage corresponding to the sensor element's reference potential to be applied to the first terminal,
• the conductive layer being electrically connected to the first terminal.