System for monitoring environment and monitoring method based on system for monitoring environment
AssigneeChangxin Memory Technologies, Inc.
InventorsXubao Wang, Yunxiao Ding
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AssigneeChangxin Memory Technologies, Inc.
InventorsXubao Wang, Yunxiao Ding
Estimating the term…
Embodiments provide a system for monitoring an environment and a monitoring method based on a system for monitoring an environment. The system for monitoring the environment includes: a sampling device, configured to collect environmental samples from the process areas and including a system sampling pipeline, the environmental sample containing air; an analysis device, connected to an output end of the system sampling pipeline and configured to analyze the collected environmental samples; and an air supply device, connected to the system sampling pipeline and configured to provide a purge gas and purge the system sampling pipeline using the purge gas. In a period for a single sampling, a ratio between a time period for purging the system sampling pipeline using the air supply device and a time period for sampling by the sampling device is controlled to be 1:5.
A monitoring method based on a system for monitoring an environment, used for monitoring concentrations of airborne contaminants in a plurality of process areas in a clean room, the system for monitoring the environment comprising:
A system for monitoring an environment, used for monitoring concentrations of airborne contaminants in a plurality of process areas in a clean room, the system comprising an air supply device, a sampling device, an analysis device, and a control device, wherein:
Dependencies are inferred from the claim text.