Fluid circuit with integrated electrostatic discharge mitigation
AssigneeEntegris, Inc.
InventorJohn A. Leys
Life of this patent
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AssigneeEntegris, Inc.
InventorJohn A. Leys
Estimating the term…
A flow path for a fluid from a fluid supply which may include a plurality of operative components including a body portion and a plurality of tubing connector fittings. The operative components may be connected by a plurality of tubing segments. Each body portion may include a nonconductive fluoropolymer portion and an outer conductor that extends between each of the plurality of tubing connector fittings and that is unitary with the non-conductive fluoropolymer portion. The plurality of tubing segments may include a non-conductive fluoropolymer tubing portion and an axial strip of conductive polymer. The outer conductor of each body portion conductively connected with tubing segments connected thereto. Each of the connectors may include a bridging component for conductively connecting the respective outer conductor of the body portion to the strip of conductive polymer of the connecting tubing segments.
A fluid circuit defining a flow path for a fluid from a fluid supply toward a process stage, the fluid circuit comprising:
A fluid circuit comprising:
Dependencies are inferred from the claim text.