Transport carrier, deposition apparatus, and electronic device manufacturing apparatus

A deposition apparatus comprising:

• a substrate loading chamber in which a substrate that is a deposition target loaded from the outside is held by a transport carrier;
• an alignment chamber in which a mask that shields a non-deposition region of the substrate is mounted on the substrate chucked by the transport carrier while being aligned;
• a deposition chamber in which film formation materials are deposited on a deposition surface of the substrate on which the mask is mounted;
• and
• an external driving source disposed outside the transport carrier,
• wherein
• the transport carrier comprises an electrostatic chucking portion configured to chuck and hold the substrate using an electrostatic force at a first surface of the electrostatic chucking portion,
• the transport carrier comprises a magnetic chucking portion, arranged at a side of a second surface of the electrostatic chucking portion opposite to the first surface of the electrostatic chucking portion, which chucks, magnetically through the electrostatic chucking portion and the substrate, the mask to the deposition surface of the substrate being held,
• the transport carrier comprises a mask holding portion which engages with the circumference of the mask to hold the mask in addition to the magnetic chucking portion,
• the magnetic chucking portion comprises a connecting hook which is detachably connected to a driving side hook of the external driving source, and
• the magnetic chucking portion is configured to move close to or away from the electrostatic chucking portion by engagement of the connecting hook and the driving side hook of the external driving source.