Pad removal method and device
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsChunhung Chen, Sheng-Chen Wang
Life of this patent
Estimating the term…
Abstract
A pad removal method includes affixing a first end of a pad guide to a first location of a pad. The method further includes affixing a second end of the pad guide to a second location of the pad. The method further includes moving the first end from a first position, a first distance from the second location, to a second position, a second distance from the second location, wherein the first distance is greater than a diameter of the pad, and the second distance is less than the width of the pad.
Claims18
A pad removal method comprising:
- affixing a first end of a pad guide to a first location of a pad;
- affixing a second end of the pad guide to a second location of the pad;
- and
- moving the first end from a first position, a first distance from the second location, to a second position, a second distance from the second location, wherein the first distance is greater than a width of the pad, and the second distance is less than the width of the pad.
A pad removal method comprising:
- affixing a first end of a pad guide to a first location of a pad;
- affixing a second end of the pad guide to a second location of the pad;
- and
- moving the first end in a first direction from a first position to a second position using a first actuator, wherein moving the first end from the first position to the second position comprises bending the pad guide in a second direction perpendicular to the first direction.
A pad removal method comprising:
- positioning a pad removal device over a pad;
- affixing the pad removal device to the pad at a plurality of locations;
- adjusting an actuator of the pad removal device to reduce a distance between a first location of the plurality of locations and a second location of the plurality of locations to less than a width of the pad, further comprising flexing a pad guide of the pad removal device during the adjusting the actuator, wherein flexing the pad guide comprises using at least one hinge in the pad guide.
Dependencies are inferred from the claim text.