Method for purifying organic solvent and apparatus for purifying organic solvent
AssigneeOrgano Corporation
InventorsNoriko Takada, Haruo Yokota, Yui Shioya, Yasuhiro Yoshimura
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Abstract
A method for purifying an organic solvent has a first treatment of bringing an organic solvent to be treated into contact with an H-type cation exchanger, and a second treatment of bringing a treated liquid from the first treatment into contact with an anion exchanger and an H-type strongly acidic cation exchanger. According to the present application, the provided method and an apparatus for purifying an organic solvent remove metal impurities of both metal species of monovalent and polyvalent metals in the organic solvent.
Claims11
A method for purifying an organic solvent, the organic solvent being an organic solvent used in semiconductor production processes or for trace metal analysis, comprising:
- a first treatment of bringing the organic solvent into contact with an H-type cation exchanger to form a treated liquid;
- and
- a second treatment of bringing the treated liquid from the first treatment into contact with an anion exchanger and an H-type strongly acidic cation exchanger,
- wherein the H-type cation exchanger is an H-type chelate exchanger.
A method for purifying an organic solvent, the organic solvent being an organic solvent used in semiconductor production processes or for trace metal analysis, comprising:
- a first treatment step of bringing the organic solvent into contact with an H-type cation exchanger to form a treated liquid;
- and
- a second treatment step of bringing the treated liquid from the first treatment step into contact with an anion exchanger and an H-type strongly acidic cation exchanger,
- wherein the H-type cation exchanger is an H-type strongly acidic cation exchanger.
Dependencies are inferred from the claim text.