# US 12,114,503 B2 · Integrated chip including a tunnel dielectric layer which has different thicknesses over a protrusion region of a substrate > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 12,114,503 B2 - Document ID: US12114503B2 - Status: Granted - Kind: B2 - Application number: 18/079,039 - Filed: 2022-12-12 - Published: 2023-04-06 - Granted: 2024-10-08 - Earliest claimed: 2015-12-29 - Assignees: Taiwan Semiconductor Manufacturing Company, Ltd. - Applicants: Taiwan Semiconductor Manufacturing Company, Ltd. - Inventors: Jui-Yu Pan; Cheng-Bo Shu; Chung-Jen Huang; Jing-Ru Lin; Tsung-Yu Yang; Yun-Chi Wu; Yueh-Chieh Chu - Web page: https://patentgrep.com/patent/US12114503B2 ## CPC - H10B 43/30: characterised by the memory core region - H10B 43/27: the channels comprising vertical portions, e.g. U-shaped channels - H10D 1/00: Resistors, capacitors or inductors - H10D 30/0413: {of FETs having charge-trapping gate insulators, e.g. MNOS transistors} - H10D 30/69: IGFETs having charge trapping gate insulators, e.g. MNOS transistors - H10P 50/283: {by chemical means} - H10B: ELECTRONIC MEMORY DEVICES - H10D: INORGANIC ELECTRIC SEMICONDUCTOR DEVICES - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 ## Abstract Some embodiments relate to an integrated chip that includes a first source/drain region and a second source/drain region disposed in a substrate. A plane that is substantially perpendicular to an upper surface of the substrate traverses the first source/drain region and the second source/drain region. Agate electrode extends over a channel region in the substrate between the first source/drain region and the second source/drain region. The gate electrode is separated from the channel region by way of a charge trapping dielectric structure. The charge trapping dielectric structure includes a tunnel dielectric layer, a charge trapping dielectric layer over the tunnel dielectric layer, and a blocking dielectric layer over the charge trapping dielectric layer. The channel region has a channel width measured perpendicularly to the plane, and the tunnel dielectric layer has different thicknesses at different respective points along the channel width. ## Claims ### Claim 1 An integrated chip, comprising: a substrate including a protrusion region, the protrusion region having an upper surface and a sidewall; and a gate electrode separated from the protrusion region by way of a tunnel dielectric layer; and wherein the tunnel dielectric layer has different thicknesses over the protrusion region such that the tunnel dielectric layer has a first thickness measured along a first direction normal to the sidewall of the protrusion region and a corresponding sidewall of the tunnel dielectric layer, and has a second thickness measured along a second direction normal to an upper surface of the protrusion region and a corresponding upper surface of the tunnel dielectric layer, the second thickness being less than the first thickness, and wherein the first direction is perpendicular to the second direction. ### Claim 2 (depends on 1) The integrated chip of claim 1, further comprising: an isolation region arranged along the sidewall of the tunnel dielectric layer. ### Claim 3 (depends on 2) The integrated chip of claim 2, wherein the tunnel dielectric layer is part of a charge trapping dielectric structure. ### Claim 4 (depends on 1) The integrated chip of claim 1 wherein a thickness of the tunnel dielectric layer varies between the first and second thicknesses within a range of between approximately 5% and approximately 25%. ### Claim 5 (depends on 4) The integrated chip of claim 4, wherein the protrusion region is arranged between segments of an isolation structure, where the substrate includes a recess whose depth is below the upper surface of the protrusion region, and the recess accommodates the segments of the isolation structure. ### Claim 6 (depends on 1) The integrated chip of claim 1, further comprising: a select gate electrode separated from the substrate by way of one or more additional gate dielectric layers that differ from the tunnel dielectric layer, wherein the select gate electrode is laterally spaced apart from the gate electrode. ### Claim 7 (depends on 1) The integrated chip of claim 1, further comprising: sidewall spacers on opposing sides of the gate electrode. ### Claim 8 An integrated chip, comprising: a first source/drain region disposed in a substrate; a second source/drain region disposed in the substrate and spaced apart from the first source/drain region; wherein a first cross-sectional plane that is substantially perpendicular to an upper surface of the substrate traverses the first source/drain region and the second source/drain region; a gate electrode extending over a channel region in the substrate between the first source/drain region and the second source/drain region; and a dielectric layer disposed over the channel region and separating the channel region from the gate electrode; and wherein the channel region has a channel width measured in a second cross-sectional plane that is perpendicular to the first cross-sectional plane, the channel region had a curved, convex upper surface in the second cross-sectional plane, and the dielectric layer has different thicknesses measured normal to the curved, convex upper surface at different respective points along the channel width, wherein the dielectric layer has a width larger than the channel width in the second cross-sectional plane. ### Claim 9 (depends on 8) The integrated chip of claim 8, wherein the different thicknesses of the dielectric layer vary at the different respective points along the channel width within a range of between approximately 5% and approximately 25%. ### Claim 10 (depends on 8) The integrated chip of claim 8: wherein the dielectric layer has a first thickness over a peripheral region of the channel region, the peripheral region being a first distance from the first cross-sectional plane; and wherein the dielectric layer has a second thickness over a central region of the channel region, the central region being a second distance from the first cross-sectional plane, the second distance being less than the first distance; and wherein the second thickness is less than the first thickness. ### Claim 11 (depends on 10) The integrated chip of claim 10, wherein the second thickness ranges from approximately 75% to approximately 95% of the first thickness. ### Claim 12 (depends on 8) The integrated chip of claim 8, further comprising: an isolation structure disposed along opposite sides of the channel region to laterally confine the channel region to the channel width, wherein the dielectric layer has a first thickness over a peripheral region of the channel region nearer the isolation structure and has a second thickness over a central region of the channel region further from the isolation structure, the second thickness being less than the first thickness. ### Claim 13 (depends on 12) The integrated chip of claim 12, wherein the isolation structure includes a first portion on one side of the channel region and a second portion on an opposite side of the channel region, wherein the first portion and the second portion each have a raised central portion arranged at a first height above the upper surface of the substrate and have a depressed portion arranged at a second height below the upper surface of the substrate. ### Claim 14 (depends on 13) The integrated chip of claim 13, wherein the dielectric layer extends continuously over the depressed portion and over the raised central portion. ### Claim 15 (depends on 8) The integrated chip of claim 8, wherein a first thickness of the dielectric layer at a first point on the channel width is approximately 20 nanometers and a second thickness of the dielectric layer at a second point on the channel width is approximately 15 nanometers. ### Claim 16 (depends on 8) The integrated chip of claim 8, further comprising: sidewall spacers extending along opposite sidewalls of the gate electrode, wherein the opposite sidewalls are perpendicularly intersected by the first cross-sectional plane. ### Claim 17 (depends on 8) The integrated chip of claim 8, further comprising: a logic gate electrode separated from the substrate by way of a thermal gate dielectric layer, wherein the substrate has a first upper surface below the thermal gate dielectric layer, which is recessed with respect to a substantially planar upper surface of the substrate below the gate electrode. ### Claim 18 An integrated chip, comprising: a gate electrode extending over an upper surface of a substrate, the gate electrode separated from the upper surface of the substrate by way of a dielectric structure; wherein the gate electrode extends along a first plane between inner sidewalls of an isolation structure arranged within the substrate and extends along a second plane between a first source/drain region and a second source/drain region, the second plane being perpendicular to the first plane; and wherein the dielectric structure has a first thickness and a second thickness measured along the first plane, the first thickness measured normal from an outer sidewall of the substrate directly below the gate electrode to a corresponding outer sidewall of the dielectric structure and the second thickness measured normal from an upper surface of the substrate directly below the gate electrode and a corresponding upper surface of the dielectric structure, the second thickness being less than the first thickness, and wherein the dielectric structure is disposed above the isolation structure when viewed from a cross section defined by the first plane. ### Claim 19 (depends on 18) The integrated chip of claim 18, wherein the second thickness ranges from approximately 75% to approximately 95% of the first thickness. ### Claim 20 (depends on 18) The integrated chip of claim 18, wherein the first thickness is approximately 20 nanometers and the second thickness is approximately 15 nanometers.