# US 12,114,411 B2 · Apparatus and method for generating extreme ultraviolet radiation

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- Number: US 12,114,411 B2
- Document ID: US12114411B2
- Status: Granted
- Kind: B2
- Application number: 18/118,039
- Filed: 2023-03-06
- Published: 2023-07-13
- Granted: 2024-10-08
- Earliest claimed: 2021-08-27
- Assignees: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicants: Taiwan Semiconductor Manufacturing Company, Ltd.
- Inventors: Yu-Huan Chen; Yu-Chih Huang; Ming-Hsun Tsai; Shang-Chieh Chien; Heng-Hsin Liu
- Web page: https://patentgrep.com/patent/US12114411B2

## CPC

- H05G 2/0023: {Constructional details of the ejection system}
- H05G: X-RAY TECHNIQUE (investigating or analysing materials by the use of X-rays G01N23/00; apparatus for X-ray photography G03B42/02; X-ray tubes H01J35/00; TV systems having X-ray input H04N5/321)

## Abstract

A target droplet source for an extreme ultraviolet (EUV) source includes a droplet generator configured to generate target droplets of a given material. The droplet generator includes a nozzle configured to supply the target droplets in a space enclosed by a chamber. In some embodiments, a nozzle tube is arranged within the nozzle of the droplet generator, and the nozzle tube includes a structured nozzle pattern configured to provide an angular momentum to the target droplets.

## Claims

### Claim 1

An extreme ultraviolet (EUV) radiation source comprising:
an EUV generation chamber enclosing a space; and
a droplet generator configured to generate target droplets of a given material, the droplet generator comprising a nozzle configured to supply the target droplets in the space, wherein:
the nozzle comprises a nozzle having a structured nozzle pattern configured to provide an angular momentum to the target droplets.

### Claim 2 (depends on 1)

The EUV radiation source of claim 1, wherein the structured nozzle pattern includes groove patterns along an inner surface of the nozzle tube.

### Claim 3 (depends on 2)

The EUV radiation source of claim 2, wherein the groove patterns include a helical groove configured to provide the angular momentum to the target droplets.

### Claim 4 (depends on 2)

The EUV radiation source of claim 2, further including discontinuous helical grooves on the inner surface of the nozzle tube.

### Claim 5 (depends on 2)

The EUV radiation source of claim 2, further including a straight groove formed in the inner surface of the nozzle tube.

### Claim 6 (depends on 1)

The EUV radiation source of claim 1, wherein the structured nozzle pattern includes a tapered inner portion disposed at an end of the nozzle tube configured to provide stability to the target droplets.

### Claim 7 (depends on 1)

The EUV radiation source of claim 1, wherein the structured nozzle pattern includes a cross-section having a shape selected from the group consisting of a circle, an ellipse, a triangle, a trapezoid, and a regular or irregular convex polygon.

### Claim 8

A droplet generator configured to generate target droplets of a given material for an extreme ultraviolet (EUV) source, comprising:
a structured nozzle tube having an inner surface comprising at least one of a groove or a projection,
wherein the structured nozzle tube is made of quartz.

### Claim 9 (depends on 8)

The droplet generator of claim 8, wherein the structured nozzle tube includes a helical groove.

### Claim 10 (depends on 8)

The droplet generator of claim 8, wherein the structured nozzle tube includes groove patterns including sharp-angled grooves.

### Claim 11 (depends on 10)

The droplet generator of claim 10, wherein the sharp-angled grooves include a pyramid shape in 3-dimension.

### Claim 12 (depends on 10)

The droplet generator of claim 10, wherein the groove patterns include discontinuous grooves on the inner surface of the structured nozzle tube.

### Claim 13 (depends on 8)

The droplet generator of claim 8, wherein the structured nozzle tube includes groove patterns that include a cross-section having a shape selected from the group consisting of a circle, an ellipse, a triangle, a trapezoid, and a regular or irregular convex polygon.

### Claim 14 (depends on 8)

The droplet generator of claim 8, wherein the structured nozzle tube has an inner diameter of 1.5 μm to 3 μm.

### Claim 15 (depends on 8)

The droplet generator of claim 8, wherein an inside of the structured nozzle tube is tapered.

### Claim 16 (depends on 15)

The droplet generator of claim 15, wherein a taper angle is from 5 degrees to 30 degrees.

### Claim 17

A method of producing target droplets for generating laser produced plasma in an extreme ultraviolet (EUV) radiation source, the method comprising:
generating target droplets of a given material by a droplet generator,
wherein an angular momentum is provided to the target droplets.

### Claim 18 (depends on 17)

The method of claim 17, wherein the angular momentum is provided by a structured nozzle tube with a structured nozzle pattern in the droplet generator.

### Claim 19 (depends on 18)

The method of claim 18, wherein the structured nozzle tube includes a longitudinal groove pitch that changes a twist torque as the target droplets get propelled through the structured nozzle tube.

### Claim 20 (depends on 18)

The method of claim 18, wherein the structured nozzle tube includes groove patterns that include a cross-section having a shape selected from the group consisting of a circle, an ellipse, a triangle, a trapezoid, and a regular or irregular convex polygon.